FIDUCIAL FOR AN ELECTRONIC DEVICE
| Register | USPTO Patent |
|---|---|
| Application Number | 17479369 |
| Status | Pending |
| Filing Date | 2021-09-20 |
| First Publication Date | 2023-03-23 |
| Publication Date | 2023-03-23 |
| Owner | Intel Corporation (USA) |
| Inventor |
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Abstract
A substrate for an electronic device may include one or more layers. The substrate may include a cavity defined in the substrate. The cavity may be adapted to receive a semiconductor die. The substrate may include a fiducial mark positioned proximate the cavity. The fiducial mark may be exposed on a first surface of the substrate. The fiducial mark may include a first region including a dielectric filler material. The fiducial mark may include a second region including a conductive filler material. In an example, the second region surrounds the first region. In another example, the dielectric filler material has a lower reflectivity in comparison to the conductive filler material to provide a contrast between the first region and the second region.IPC Classes ?
- H01L 23/544 - Marks applied to semiconductor devices, e.g. registration marks, test patterns