DIELECTRIC LAYER SEPARATING A METAL PAD OF A THROUGH GLASS VIA FROM A SURFACE OF THE GLASS

Register USPTO Patent
Application Number 17507010
Status Pending
Filing Date 2021-09-17
First Publication Date 2023-03-23
Publication Date 2023-03-23
Owner Intel Corporation (USA)
Inventor
  • Pietambaram, Srinivas V.
  • Paital, Sameer
  • Darmawikarta, Kristof
  • Tanaka, Hiroki
  • Marin, Brandon C.
  • Ecton, Jeremy D.
  • Duan, Gang

Abstract

Embodiments described herein may be related to apparatuses, processes, and techniques directed to a glass core within a substrate in a package, with one or more through glass vias (TGV) that are filled with a conductive material to electrically couple a first side of the glass core with a second side of the glass layer opposite the first side. A pad, also of conductive material, is electrically and physically coupled with a first and/or second end of the conductive material of the TGV. A layer of dielectric material is between at least a portion of the pad and the surface of the glass core between the pad and the glass core during manufacturing, handling, and/or operation to facilitate a reduction of stress cracks in the glass core. Other embodiments may be described and/or claimed.

IPC Classes  ?

  • H01L 23/15 - Ceramic or glass substrates
  • H01L 21/768 - Applying interconnections to be used for carrying current between separate components within a device