- All sections
- H - Electricity
- H01L - Semiconductor devices not covered by class
- H01L 21/66 - Testing or measuring during manufacture or treatment
Patent holdings for IPC class H01L 21/66
Total number of patents in this class: 11781
10-year publication summary
|
926
|
1052
|
1002
|
1136
|
1157
|
1144
|
1119
|
955
|
977
|
404
|
| 2014 | 2015 | 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Taiwan Semiconductor Manufacturing Company, Ltd. | 33184 |
870 |
| KLA-Tencor Corporation | 2604 |
734 |
| Applied Materials, Inc. | 15525 |
551 |
| Tokyo Electron Limited | 11116 |
527 |
| Samsung Electronics Co., Ltd. | 123340 |
378 |
| Hitachi High-Technologies Corporation | 2065 |
259 |
| KLA Corporation | 1033 |
219 |
| International Business Machines Corporation | 63166 |
198 |
| Lam Research Corporation | 4435 |
170 |
| Hitachi High-Tech Corporation | 4016 |
166 |
| Changxin Memory Technologies, Inc. | 3276 |
154 |
| Micron Technology, Inc. | 24260 |
149 |
| Renesas Electronics Corporation | 6555 |
142 |
| Infineon Technologies AG | 8656 |
142 |
| ASML Netherlands B.V. | 6526 |
139 |
| Shin-Etsu Handotai Co., Ltd. | 1257 |
135 |
| Texas Instruments Incorporated | 19204 |
128 |
| Boe Technology Group Co., Ltd. | 32993 |
121 |
| Samsung Display Co., Ltd. | 27993 |
111 |
| Kioxia Corporation | 9260 |
109 |
| Other owners | 6379 |