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2024
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G/S
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Machines for the assembly and packaging of electronic semiconductor chips; machines for manufactu... |
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G/S
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Machines for the assembly and packaging of electronic
semiconductor chips; machines for manufact... |
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2023
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Invention
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System and apparatus for a valve assembly.
A valve assembly may provide a body comprising a bott... |
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Invention
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Method for fabricating layer structure having target topological profile.
A method for fabricati... |
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Invention
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Transition metal nitride deposition method.
The present disclosure relates to methods and appara... |
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Invention
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Method for forming a semiconductor device structure and related semiconductor device structures. ... |
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Invention
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Method of depositing vanadium metal, structure, device and a deposition assembly.
The current di... |
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Invention
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Substrate handling device with adjustable joints.
An adjustable joint for insertion into a linka... |
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Invention
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Method and device for depositing silicon onto substrates.
A method for forming a layer on a subs... |
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Invention
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Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposi... |
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Invention
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Semiconductor processing chamber with filament lamps having nonuniform heat output.
An arrangeme... |
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Invention
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Vapor delivery apparatus, associated vapor phase reactor and methods of use.
Vapor delivery appa... |
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Invention
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Gas inlet tube assembly for an improved gas mixture in a substrate processing apparatus.
A gas i... |
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Invention
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Liquid-source precursor delivery system apparatus and method of using same.
Liquid delivery syst... |
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Invention
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Systems and methods for monitoring a condition of lamps used in semiconductor fabrication process... |
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Invention
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Chamber arrangements with laser sources, semiconductor processing systems, and material layer dep... |
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Invention
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Lift pin actuators for semiconductor processing systems and related methods.
A lift pin actuator... |
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Invention
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Wafer processing apparatus.
A wafer processing apparatus may be presented. The apparatus compris... |
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Invention
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Loadlock assembly including chiller unit.
A loadlock assembly is disclosed. Exemplary loadlock a... |
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G/S
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Machines for the assembly and packaging of electronic chips; machines for manufacturing semicondu... |
|
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Invention
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Systems and apparatus for a lift pin assembly.
Various embodiments of the present technology may... |
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Invention
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Substrate processing apparatus.
A substrate processing apparatus may be presented. The apparatus... |
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Invention
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Gapfill methods and processing assemblies.
The disclosure relates to methods of filling gaps in ... |
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Invention
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Transition metal deposition processes and a deposition assembly.
The current disclosure relates ... |
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Invention
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Methods and assemblies for selectively depositing transition metals.
The disclosure relates to m... |
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Invention
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Reaction chamber component, deposition apparatus provided with such component and method of prote... |
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Invention
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Method of forming a si-comprising epitaxial layer selectively on a substrate.
A method for formi... |
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Invention
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Methods for forming mandrels and spacers, related structures, and systems.
Methods for patternin... |
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Invention
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Methods for providing a precursor mixture to a reaction chamber.
Methods and systems for mixing ... |
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Invention
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Compositions comprising borazine and its derivatives, and related methods and systems.
Compositi... |
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Invention
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System and apparatus for a lift pin.
A lift pin assembly includes a holder to engage and secure ... |
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Invention
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Flow control arrangements, semiconductor processing systems having flow control arrangements, and... |
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Invention
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System and apparatus for a reaction chamber.
Various embodiments of the present technology may p... |
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Invention
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Chamber arrangements, semiconductor processing systems having chamber arrangements, and related m... |
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Invention
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Method, assembly and system for gas injection and control.
Methods, systems, and assemblies suit... |
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Invention
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Method, assembly and system for gas injection.
Methods, systems, and assemblies suitable for gas... |
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Invention
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Method and systems for forming device structures including high-k dielectric layers and related d... |
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Invention
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Substrate processing method.
A substrate processing method includes providing, in a reaction spa... |
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Invention
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Substrate processing method.
A method of processing a substrate having a gap includes loading th... |
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Invention
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Substrate processing method.
A method of processing a substrate is disclosed, the method includi... |
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Invention
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Substrate processing apparatus.
A substrate processing apparatus configured to from a layer on a... |
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Invention
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Method of forming material within a recess.
Methods and systems of forming material within a rec... |
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Invention
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Substrate processing method.
Provided is a method of efficiently forming a dense and solid silic... |
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Invention
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Methods and apparatus for a susceptor lift tool.
Embodiments of the present invention provide a ... |
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Invention
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Wafer boat and a method for forming layer on a plurality of substrates.
A wafer boat and a metho... |
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Invention
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Method for forming layer on different-density pattern regions.
A method for forming a layer on a... |
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Invention
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Pressure-based sensor system for precursor level measurement and method therefor.
A pressure-bas... |
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G/S
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Machines for manufacturing semiconductors, including parts
and fittings therefor; semiconductor ... |
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G/S
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Machines for manufacturing semiconductors, including parts and fittings therefor; semiconductor m... |
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Invention
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Method of selectively forming phosphorous-doped epitaxial material on a surface.
Methods and sys... |
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Invention
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Selective deposition of silicon oxide on metal surfaces.
Methods for selective deposition of sil... |
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2022
|
G/S
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Maintenance and repair of products for use in the manufacturing process for semiconductors, integ... |
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2021
|
G/S
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Chemical source material for the deposition of thin film layers upon semiconductor wafers and sub... |
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2020
|
Invention
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Methods for filling a gap feature on a substrate surface and related semiconductor structures.
M... |
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G/S
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Machines for the assembly and packaging of electronic chips;
machines for manufacturing semicond... |
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2017
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G/S
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Machines and machine tools, namely semiconductor wafer processing equipment, including thermal tr... |
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G/S
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Chemical source material for the deposition of thin film
layers upon semiconductor wafers and su... |
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2016
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G/S
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Semiconductor manufacturing machines; semiconductor manufacturing machines and systems composed o... |
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G/S
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Apparatus for the manufacturing of semiconductors, including
parts and fittings therefor. |
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G/S
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Semiconductor manufacturing machines and machine tools and
parts thereof. |
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2015
|
G/S
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Process equipment for the chemical treatment of
semiconductor wafers by means of a gas phase pro... |
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2014
|
G/S
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Semiconductor wafer processing reactors for the chemical treatment and the thermal treatment of s... |
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G/S
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Process equipment for the chemical treatment of
semiconductor wafers; chemical reactors for the ... |
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G/S
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Mechanical machines for the semiconductor industry,
especially for the production of semiconduct... |
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2011
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G/S
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Mechanical machines for use in the semiconductor industry, namely, for the manufacture of semicon... |
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G/S
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Mechanical machines for use in the semiconductor industry,
particularly for the manufacture of s... |
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2009
|
G/S
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Chemical source material for the deposition of thin films in the manufacturing of semiconductors |
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2004
|
G/S
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Machines and machine tools, namely semi-conductor wafer processing equipment, including thermal t... |
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G/S
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Machines and machine tools, namely semi-conductor wafer
processing equipment, including thermal ... |
