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2023
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Invention
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X-ray generation apparatus, x-ray imaging apparatus, and adjustment method of x-ray generation ap... |
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Invention
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Electric component, x-ray generation apparatus, and x-ray imaging apparatus.
An electric compone... |
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Invention
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Sputtering apparatus.
A sputtering apparatus includes a first target holder configured to hold a... |
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Invention
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Deposition apparatus.
A deposition apparatus, which forms a film on a substrate, includes a rota... |
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Invention
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X-ray generating apparatus, method of adjusting target, and method of using x-ray generating appa... |
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Invention
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Inspection apparatus and inspection method.
An inspection apparatus for inspecting an inspection... |
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Invention
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Inspection apparatus and inspection method. An inspection apparatus for inspecting an inspection ... |
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Invention
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X-ray generator, x-ray imager, and method for adjusting x-ray generator. This X-ray generator is ... |
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Invention
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Laminated body and laminated body manufacturing method.
Provided are a laminated body and a lami... |
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Invention
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Ion gun and vacuum processing apparatus. An ion gun according to one embodiment of the present in... |
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2022
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Invention
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Inspection device and inspection method. This inspection device for inspecting an object to be in... |
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Invention
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Identification device that detects foreign matter and operates using fluorescence x-rays. This in... |
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Invention
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Inspection device and inspection method. According to the present invention, an inspection device... |
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Invention
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Method for atomic diffusion bonding and bonded structure.
Atomic diffusion bonding is carried ou... |
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Invention
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Chemical bonding method, package-type electronic component, and hybrid bonding method for electro... |
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Invention
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X-ray generation device, x-ray imaging device, and method for adjusting x-ray generation device. ... |
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Invention
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Plasma processing apparatus. A plasma processing apparatus includes a balun having a first unbala... |
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Invention
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Film forming apparatus, control apparatus for film forming appartus, and film forming method.
A ... |
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Invention
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Stacked structure, memory device and method of manufacturing stacked structure.
A stacked struct... |
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Invention
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Ion gun and vacuum processing apparatus. An ion gun including an anode, a cathode opposed to the ... |
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Invention
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Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly.
Pr... |
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Invention
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Electric component, x-ray generation device, and x-ray imaging device. This electric component co... |
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Invention
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X-ray generation device, target adjusting method, and method for using x-ray generation device. T... |
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Invention
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X-ray generation device and x-ray imaging device. This X-ray generation device is provided with: ... |
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Invention
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Inspection device and inspection method. This inspection device for inspecting a surface to be in... |
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Invention
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Vacuum processing device. A vacuum processing device according to the present invention comprises... |
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Invention
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Chemical bonding method and joined structure. A bonded structure includes a first substrate; a se... |
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Invention
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Chemical bonding method and joined structure.
The present invention achieves chemical bonding by... |
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Invention
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Substrate processing apparatus and substrate processing method. A substrate processing apparatus ... |
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Invention
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Load lock device.
A load lock device includes a load lock chamber including a first conveyance p... |
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Invention
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Load lock device.
A load lock device includes a load lock chamber, and a substrate holding struc... |
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2021
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Invention
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Plasma processing apparatus. A plasma processing apparatus includes a balun having a first input ... |
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Invention
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Sputtering apparatus and film formation method. A sputtering apparatus provided with a treatment ... |
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Invention
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Structure and method of manufacturing the same.
A structure in which a plurality of particles ea... |
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Invention
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Ion gun and vacuum processing equipment. An ion gun has an anode, a cathode having first and seco... |
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Invention
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Method for atomic diffusion bonding and bonded structure. Atomic diffusion bonding is carried out... |
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Invention
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Laminate and method of manufacturing laminate. Provided are: a laminate that can improve the adhe... |
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Invention
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X-ray generation device and x-ray image capture system. An X-ray generation device includes a cat... |
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Invention
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X-ray generation apparatus and x-ray imaging apparatus. An X-ray generation apparatus includes an... |
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Invention
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Chemical bonding method and packaged electronic component. In the present invention, substrates t... |
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Invention
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Ionization gauge and cartridge. An ionization gauge includes an anode having a rod shape, and a c... |
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2020
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Invention
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Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly. Pro... |
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Invention
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Film formation device, device for controlling film formation device, and film formation method. 2... |
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Invention
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Ion gun and vacuum processing device. An ion gun has: an anode; a cathode having a first portion ... |
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2014
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G/S
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Semiconductor substrate processing machines, namely, annealers, electron bombardment annealers an... |
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2005
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G/S
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semiconductor manufacturing machines; integrated circuit manufacturing machines; semiconductor el... |
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1992
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G/S
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maintenance and repair services for vacuum processing apparatus for manufacturing semiconducting ... |
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1991
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G/S
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vacuum apparatus for manufacturing semiconductor devices; namely, multi-chamber chemical vapor de... |
