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2023
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Invention
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Substrate processing apparatus, method of manufacturing semiconductor device, and recording mediu... |
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Invention
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Substrate processing apparatus, processing method, and non-transitory computer-readable recording... |
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Invention
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Vaporizer, processing apparatus and method of manufacturing semiconductor device.
Described here... |
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Invention
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Substrate processing apparatus and method of manufacturing semiconductor device.
Described herei... |
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Invention
|
Method of manufacturing semiconductor device and non-transitory computer-readable recording mediu... |
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Invention
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Substrate processing apparatus, plasma generation apparatus, method of processing substrate, meth... |
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Invention
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Substrate processing apparatus, method of processing substrate, method of manufacturing semicondu... |
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Invention
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Method of processing substrate, method of manufacturing semiconductor device, recording medium, a... |
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Invention
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Method of processing substrate, method of manufacturing semiconductor device, substrate processin... |
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Invention
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Substrate processing apparatus, method of cleaning, method of manufacturing semiconductor device,... |
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Invention
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Gas supplier processing apparatus, and method of manufacturing semiconductor device.
A technique... |
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Invention
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Substrate processing method, method of manufacturing semiconductor device, non-transitory compute... |
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Invention
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Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory c... |
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Invention
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Conversion pipe arrangement, substrate processing apparatus, method of processing substrate, and ... |
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Invention
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Exhaust structure, exhaust system, processing device, and method for manufacturing semiconductor ... |
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Invention
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Substrate treatment device, gas supply unit, production method for semiconductor device, and prog... |
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Invention
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Substrate treatment apparatus, exhaust system, and method for manufacturing semiconductor device.... |
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Invention
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Substrate processing method, production method for semiconductor device, program, and substrate p... |
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2022
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Invention
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Inner tube of reaction tube for semiconductor manufacturing equipment |
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Invention
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Substrate processing method, method for manufacturing semiconductor device, substrate processing ... |
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Invention
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Substrate processing method, method for manufacturing semiconductor device, program, and substrat... |
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Invention
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Substrate processing device, substrate processing method, method for manufacturing semiconductor ... |
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Invention
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Pipe heating system, substrate processing device, and method for manufacturing semiconductor devi... |
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Invention
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Substrate processing method, semiconductor device manufacturing method, substrate processing devi... |
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Invention
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Substrate treatment device, method for manufacturing semiconductor device, and program. The prese... |
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Invention
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Substrate treatment device, production method for semiconductor device, and program. The present ... |
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Invention
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Substrate processing method, method for producing semiconductor device, substrate processing appa... |
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Invention
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Substrate treatment device, thermal insulation structure, semiconductor device production method,... |
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Invention
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Substrate processing device, nozzle, method for manufacturing semiconductor device, and program. ... |
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Invention
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Tubular reactor |
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Invention
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Wafer support of semiconductor manufacturing apparatus |
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2021
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Invention
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Gas injector for substrate processing apparatus |
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2019
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G/S
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Semiconductor manufacturing machines |
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2018
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G/S
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Semiconductor manufacturing machines. |
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2003
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G/S
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Semiconductor manufacturing machines and systems; semiconductor element manufacturing machines; i... |
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2002
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G/S
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Semiconductor manufacturing machines and systems comprising one or more of CVD (chemical vapor de... |
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1998
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G/S
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Semiconductor manufacturing machines, CVD (Chemical Vapor deposition) machines, PVD (physical vap... |
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1992
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G/S
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semiconductor manufacturing apparatus;, namely, diffusion/oxidation furnace, low pressure chemica... |
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1990
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G/S
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Diffusion furnaces and vapour deposition apparatus for use in the production of semiconductors. |
