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2023
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Invention
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Plasma process uniformity by wafer back side doping.
Disclosed are systems and methods for impro... |
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Invention
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Multiplexer with floating raised frame bulk acoustic wave device.
Aspects of this disclosure rel... |
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Invention
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Recess frame structure for reduction of spurious signals in a bulk acoustic wave resonator.
A me... |
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Invention
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Radio-frequency circuits and devices having harmonic suppression.
In some embodiments, a radio-f... |
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Invention
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Acoustic wave device with wurtzite based piezoelectric layer.
Aspects of this disclosure relate ... |
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Invention
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Acoustic wave device with wurtzite based piezoelectric layer with high acoustic velocity.
Aspect... |
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Invention
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Mems microphone with an anchor.
A method for manufacturing a microelectromechanical systems micr... |
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2022
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Invention
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Crossbar switch for coarse phase shifting.
Crossbar switches for coarse phase shifting are discl... |
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Invention
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Bulk acoustic wave resonator structure.
Embodiments of this disclosure relate to bulk acoustic w... |
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Invention
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Steep skirt combination microelectromechanical system cavity filter and bulk acoustic wave filter... |
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Invention
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Piezoelectric microelectromechanical system microphone with compliant anchors.
A piezoelectric m... |
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Invention
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Bulk acoustic wave resonator with stacked piezoelectric layers.
A bulk acoustic resonator compri... |
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Invention
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Method for forming a piezoelectric film.
A piezoelectric film on a substrate is provided compris... |
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Invention
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Raised frame layer in bulk acoustic wave device.
A bulk acoustic wave (BAW) device is provided c... |
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Invention
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Method of manufacturing bulk acoustic wave device with atomic layer deposition of piezoelectric l... |
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Invention
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Bulk acoustic wave resonator with multilayer electrode.
A bulk acoustic wave resonator having a ... |
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Invention
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Bulk acoustic wave resonator with reduced perimeter leakage.
A bulk acoustic wave resonator havi... |
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Invention
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Bulk acoustic wave device with piezoelectric layer formed by atomic layer deposition.
Aspects of... |
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Invention
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Bulk acoustic wave device with stacked piezoelectric layers.
Aspects of this disclosure relate t... |
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Invention
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Bulk acoustic wave resonator with modified outer region.
The present disclosure provides a bulk ... |
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Invention
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Bulk acoustic wave devices with gap for improved performance.
Aspects of this disclosure relate ... |
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Invention
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Suspended frame bulk acoustic wave devices.
Aspects of this disclosure relate to bulk acoustic w... |
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Invention
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Piezoelectric mems device with thermal compensation from different material thicknesses.
A piezo... |
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Invention
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Piezoelectric mems device with thermal compensation from different material properties.
A piezoe... |
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Invention
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Piezoelectric mems device with thermal compensation from one or more compensation layers.
A syst... |
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Invention
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Passband filter combining resonators of a first type and resonators of a second type.
According ... |
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Invention
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Radio frequency front end module with integrated resonator and antenna.
A radio-frequency front ... |
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Invention
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Piezoelectric microelectromechanical system corrugated microphone.
A piezoelectric microelectrom... |
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Invention
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Acoustic wave devices with common ceramic substrate.
An acoustic wave component is disclosed. Th... |
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Invention
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Radio frequency acoustic wave device with imbalanced raised frame.
A bulk acoustic wave resonato... |
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Invention
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Radio frequency acoustic device with laterally distributed reflectors.
A bulk acoustic wave reso... |
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Invention
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Bulk acoustic wave resonator with oxide raised frame.
A ladder filter comprises series arm bulk ... |
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Invention
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Acoustic wave device having stacked piezoelectric layers between electrodes.
Aspects of this dis... |
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Invention
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Raised frame bulk acoustic wave devices.
Aspects of this disclosure relate to bulk acoustic wave... |
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Invention
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Bulk acoustic wave devices with tuned acoustic impedance.
Aspects of this disclosure relate to b... |
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Invention
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Filters with raised frame bulk acoustic wave devices.
Aspects of this disclosure relate to bulk ... |
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Invention
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Acoustic wave filter with buried connection layer under resonator.
A packaged acoustic wave comp... |
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Invention
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Method of manufacturing an acoustic wave filter with buried connection layer under resonator.
A ... |
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Invention
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Acoustic wave filter with overtone mode resonators.
Aspects of this disclosure relate to acousti... |
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Invention
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Acoustic wave filter with overtone mode resonator and fundamental mode resonator.
Aspects of thi... |
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Invention
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Acoustic devices with edge corrugation. An acoustic sensor (e.g., for use in a piezoelectric MEMS... |
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2021
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Invention
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Devices and methods related to film bulk acoustic resonators. Devices and methods related to film... |
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Invention
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Bulk acoustic wave device with multi-gradient raised frame.
Aspects of this disclosure relate to... |
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Invention
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Multi-gradient raised frame in bulk acoustic wave device.
Aspects of this disclosure relate to a... |
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Invention
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Bulk acoustic wave device with raised frame structure.
Aspects of this disclosure relate to a bu... |
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Invention
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Bulk acoustic wave resonators with patterned mass loading layers.
Aspects of this disclosure rel... |
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Invention
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Methods of manufacturing bulk acoustic wave resonators with patterned mass loading layers.
Aspec... |
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Invention
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Bulk acoustic wave resonator with mass loading layer. Aspects of this disclosure relate to bulk a... |
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Invention
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Bulk acoustic wave resonator with patterned mass loading layer and recessed frame.
Aspects of th... |
