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2022
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Invention
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Method for manufacturing semiconductor-on-insulator structure. The present invention relates to a... |
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Invention
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Mems device and manufacturing method therefor. An MEMS device and a manufacturing method therefor... |
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Invention
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Wafer-level system packaging method and wafer-level system packaging structure. The present inven... |
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Invention
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Wafer-level package system-in-package structure and packaging method. Disclosed are a wafer-level... |
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Invention
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Wafer-level system packaging structure and packaging method. Provided in the present invention ar... |
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Invention
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Wafer-level packaging structure and manufacturing method therefor. The present invention provides... |
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2021
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Invention
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Mems device and method for fabrication thereof. Provided are a micro-electro-mechanical system (M... |
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Invention
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Board-level system-level packaging method and structure, and circuit board and forming method. A ... |
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Invention
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Thin-film piezoelectric acoustic resonator. Disclosed is a thin-film piezoelectric acoustic reson... |
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Invention
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Thin-film surface acoustic wave resonator and manufacturing method therefor. The present inventio... |
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Invention
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Film bulk acoustic resonator and manufacturing method therefor, and filter. The present invention... |
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Invention
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Semiconductor substrate and manufacturing method therefor, and semiconductor device structure and... |
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Invention
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Bulk acoustic wave resonator, filter and radio frequency communication system.
A bulk acoustic w... |
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Invention
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Method for manufacturing film bulk acoustic resonator, and filter. The present invention relates ... |
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Invention
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Method for manufacturing thin-film bulk acoustic resonator. Disclosed is a method for manufacturi... |
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Invention
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Manufacturing method for thin film bulk acoustic wave resonator. Disclosed in the present inventi... |
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Invention
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Thin-film bulk acoustic wave resonator and method for manufacture thereof and filter. Disclosed a... |
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Invention
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Radio frequency semiconductor device structure and manufacturing method therefor. The present inv... |
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Invention
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Film bulk acoustic resonator, manufacturing method therefor and filter thereof. The present inven... |
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Invention
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Surface acoustic wave resonator and production method therefor. A surface acoustic wave resonator... |
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Invention
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Wafer-level packaging method. A wafer-level packaging method. The method comprises: providing a f... |
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Invention
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Wafer level packaging method and packaging structure. A wafer level packaging method and a packag... |
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Invention
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Wafer-grade packaging method and packaging structure. A water-grade packaging method and a packag... |
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Invention
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Wafer level packaging method and package structure of mems device. A wafer level packaging method... |
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Invention
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Thin-film bulk acoustic wave resonator and manufacturing method therefor. The present invention r... |
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Invention
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Film bulk acoustic resonator and manufacturing method therefor. The present invention relates to ... |
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Invention
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Method for manufacturing semiconductor-on-insulator structure. Provided is a method for manufactu... |
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2020
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Invention
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Moving mechanism and forming method and driving method therefor, electronic device, and imaging a... |
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Invention
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Film bulk acoustic resonator and fabrication method thereof.
A film bulk acoustic resonator and ... |
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2019
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Invention
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Integration method and integration structure for control circuit and acoustic wave filter.
The p... |
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Invention
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Integration method and integration structure for control circuit and bulk acoustic wave filter.
... |
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Invention
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Integration method and integration structure for control circuit and surface acoustic wave filter... |
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Invention
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Integrated structure of crystal resonator and control circuit and integration method therefor.
A... |
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Invention
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Mems package structure and method for manufacturing same.
A MEMS package structure and a method ... |
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Invention
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Mems encapsulation structure and manufacturing method thereof.
A micro-electro-mechanical system... |
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Invention
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Mems packaging structure and manufacturing method therefor. a) through a bonding layer (500). The... |
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Invention
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Mems package structure and manufacturing method therefor.
A micro-electro-mechanical system (MEM... |
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Invention
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Integration structure of crystal osciliator and control circuit and integration method therefor. ... |
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Invention
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Crystal resonator, and integrated structure of control circuit and integration method therefor.
... |
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Invention
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Integrated structure of and integrated method for crystal resonator and control circuit.
A struc... |
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Invention
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Integrating structure for crystal resonator and control circuit, and integrating method therefor.... |
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Invention
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Mems packaging structure and fabrication method therefor.
A micro-electro-mechanical system (MEM... |
