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2023
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Invention
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Method of manufacturing bulk acoustic wave resonator.
Provided is a method of manufacturing a bu... |
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2022
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Invention
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Method of manufacturing bulk acoustic wave resonator. Provided is a method of manufacturing a bul... |
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Invention
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Bulk acoustic wave filter and manufacturing method thereof, communication device. A bulk acoustic... |
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Invention
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Bulk acoustic wave filter having release hole and fabricating method of the same.
A bulk acousti... |
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Invention
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Electrode structure of bulk acoustic resonator with edge air gap and fabrication method thereof. ... |
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Invention
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Surface acoustic wave resonator, filter, manufacturing method thereof, and communication device. ... |
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Invention
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Surface acoustic wave resonator, filter, and communication device.
A surface acoustic wave reson... |
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Invention
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Bulk acoustic wave resonator and bulk acoustic wave filter. A bulk acoustic wave resonator and a ... |
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2021
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Invention
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Fbar structure having single crystalline piezoelectric layer and fabricating method thereof.
A f... |
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Invention
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Lithium niobate or lithium tantalate fbar structure and fabricating method thereof.
A film bulk ... |
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Invention
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Lithium niobate or lithium tantalate fbar structure and fabricating method thereof.
A method for... |
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Invention
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Film bulk acoustic resonator structure and fabricating method.
A film bulk acoustic resonator (F... |
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Invention
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Film bulk acoustic resonator structure and fabricating method.
A method for fabricating a film b... |
