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2024
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G/S
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Inspection tool using an electron beam for inspection of semiconductor materials, devices and pro... |
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G/S
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Inspection tool using an electron beam for inspection of
semiconductor materials, devices and pr... |
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Invention
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Charged-particle apparatus, multi-device apparatus, method of using charged-particle apparatus an... |
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Invention
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Charged particle assessment system and method.
A charged particle assessment apparatus comprisin... |
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Invention
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Platform for charged particle apparatus and components within a charged particle apparatus.
Disc... |
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Invention
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Metrology system and method for determining a characteristic of one or more structures on a subst... |
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Invention
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Metal-silicide-nitridation for stress reduction.
A pellicle for a lithographic apparatus, the pe... |
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Invention
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Shield arrangement for electron-optical module. A charged particle-optical module for a charged p... |
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Invention
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System and method for calibration of inspection tools. Systems, apparatuses, and methods for cali... |
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Invention
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An illumination module for a metrology device. Disclosed is an illumination configuration module ... |
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Invention
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Gas flow apparatus and method for euv light source. A liner for a source vessel for extreme ultra... |
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Invention
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Tubular acoustic damping device, fluid transport system, cooling system and lithographic apparatu... |
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Invention
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Fluid transport system, temperature conditioing system, lithographic apparatus and flexible hose.... |
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Invention
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Electromagnetic motor and method of determining a position dependent motor constant for an electr... |
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Invention
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System and method for tailoring chuck stiffness. A lithographic apparatus that includes an illumi... |
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Invention
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A method to monitor the cgi model performance without ground truth information. An apparatus to p... |
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Invention
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Euv radiation source and position-controllable mirror. An EUV radiation source comprising a laser... |
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Invention
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Height measurement error determination. A method of determining a substrate height measurement er... |
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Invention
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Substrate storage module and method. A substrate storage module for use as an integral part of a ... |
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Invention
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A method for modeling metrology data over a substrate area and associated apparatuses. Disclosed ... |
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Invention
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Electron-optical plate. The present disclosure relates to a charged particle-optical plate for a ... |
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Invention
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A method for modeling measurement data over a substrate area and associated apparatuses. Disclose... |
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Invention
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Gas mixture for hollow core fiber used in generating broadband radiation. A hollow core fiber and... |
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Invention
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Plasma fluorination of diamond for spotless flatness puck performance extension. A tool for remov... |
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Invention
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System and method for aligning a substrate. The present disclosure provides a system and a method... |
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Invention
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Method and system for generating a lithography process aware pupil profile. Described is a method... |
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Invention
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Parallel sensing camera based metrology systems and methods. Existing technology is often configu... |
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Invention
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Optical component array substitution for metrology. An optical component array substitution that ... |
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Invention
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Alignment metrology using a local oscillator. A detection module includes a phase sensitive ampli... |
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Invention
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Hollow-core optical fiber based radiation source. A broadband radiation device comprising a HC-PC... |
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Invention
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Electrical connector. An electrical connector comprising a block of non-conductive flexible polym... |
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Invention
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Euv mask. Disclosed herein is a mask for patterning radiation in a lithographic apparatus, the ma... |
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Invention
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Broad spectrum metrology systems and methods for various metrology mark types. Broad spectrum met... |
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Invention
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Methods and systems for determining a property of euv radiation. A sensor for determining a prope... |
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Invention
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Substrate support and lithographic apparatus. A substrate support configured to support a substra... |
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Invention
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Fluid handling structure. Disclosed herein is a fluid handling structure for an immersion lithogr... |
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Invention
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System for supporting a pellicle in a lithographic apparatus, allowing for pressure increase in a... |
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Invention
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Systems and methods for thermally stable mounting of optical columns.
Systems and methods are di... |
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2023
|
G/S
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Machines for micro lithography and machines for use in the manufacture, fabrication and treatment... |
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G/S
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Machines for micro lithography and machines for use in the
fields of integrated circuits, semico... |
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G/S
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Registered software, namely, recorded software for the storage, processing and generation of data... |
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G/S
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Software, especially software for the storage, processing
and generation of data and graphics. |
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2022
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G/S
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Software, especially software for the storage, processing and generation of data and graphics. |
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G/S
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Micro-lithography apparatus and instruments for use in the electronics, micro-lithography, semi-c... |
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Invention
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Metrology target optimization.
A method of designing a target includes obtaining a model of an i... |
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Invention
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System and method for inspection by failure mechanism classification and identification in a char... |
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Invention
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Optical element for use in metrology systems.
An optical element, and a metrology tool or system... |
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Invention
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Match the aberration sensitivity of the metrology mark and the device pattern.
Generating a desi... |
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Invention
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Charged-particle optical device.
Charged-particle optical devices are disclosed. In one arrangem... |
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Invention
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Method for generating mask pattern.
A method for generating a mask pattern for a lithographic pr... |
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Invention
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Electromagnetic motor system, postion control system, stage apparatus, lithographic apparatus, me... |
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Invention
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Lithography system, substrate sag compensator, and method.
A system includes a support table hav... |
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Invention
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Method of determining a correction for at least one control parameter in a semiconductor manufact... |
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Invention
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Method and system for anomaly-based defect inspection.
Systems and methods for detecting a defec... |
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Invention
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Image distortion correction in charged particle inspection.
An improved systems and methods for ... |
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Invention
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System and method for adjusting beam current using a feedback loop in charged particle systems.
... |
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Invention
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Lithographic apparatus, temperature sensor, and fiber bragg grating sensor.
A lithographic appar... |
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2021
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Invention
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A contamination reduction system.
A contamination reduction system for reducing contamination of... |
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G/S
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Recorded software, in particular software for the storage, processing, and generation of data and... |
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2020
|
G/S
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Maintenance and repair services in connection with machines for use in microlithography and in th... |
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G/S
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Maintenance and repair services in connection with machines for use in the electronics, micro-lit... |
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G/S
|
Maintenance and repair services in connection with machines
for use in the electronics, micro-li... |
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2018
|
G/S
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Computer hardware and software for the design and manufacture of semiconductor wafers and masks; ... |
|
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G/S
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Computer hardware and software for the design and
manufacture of semiconductor wafers and masks;... |
|
2017
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G/S
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Semiconductor lithographic machines, namely, lithographic machines used to manufacture semiconduc... |
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G/S
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Computer hardware for improving lithography manufacturing
processes; computer software for impro... |
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G/S
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[ Grinding, cutting, polishing and coating of glass and other optical surfaces ] Micro-lithograp... |
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2016
|
G/S
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Micro-lithography equipment; machines for use in the manufacture by micro-lithography, especially... |
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2015
|
G/S
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Exposure units being optical instruments and their parts, for use in lithographic machines, namel... |
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G/S
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Exposure units [optical instruments] and their parts, for
use in lithographic machines. |
|
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G/S
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Machine tool for mounting, demounting and remounting a
pellicle to a reticle in lithographic equ... |
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G/S
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Electronic inspection devices, data processors, computer hardware and software for defect inspect... |
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G/S
|
[ Electronic inspection devices and ] computer software for inspection of semiconductor materials... |
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|
G/S
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Inspection tool using particle beam for inspection of semiconductor materials, devices and products |
|
2014
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G/S
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Process control equipment for semiconductor wafer production, namely particle beam emitter in the... |
|
|
G/S
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Optical measuring apparatus and instruments for measuring test wafers for the manufacture of elec... |
|
|
G/S
|
Optical measuring apparatus and instruments for measuring
test wafers for the manufacture of ele... |
|
2013
|
G/S
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Electronic imaging platforms in the field of inspection of semiconductor materials, namely, semic... |
|
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G/S
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Machinery maintenance and repair in the field of semiconductor industry; installation of semicond... |
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|
G/S
|
Technology supervision and inspection in the field of quality control of semiconductor wafers and... |
|
2012
|
G/S
|
testing and inspection in the field of quality control of semiconductor wafers and reticles |
|
|
G/S
|
Micro-lithography machines, namely, machines for manufacturing electronic components, integrated ... |
|
|
G/S
|
Micro-lithography machines; machines for use in the
electronics, integrated circuit, semi-conduc... |
|
|
G/S
|
[ Cutting, polishing and heat treatment and coating of glass and other optical surfaces, namely, ... |
|
2011
|
G/S
|
Machines for micro-lithography, namely, machines for manufacturing semiconductors; machines not i... |
|
|
G/S
|
Micro-lithography equipment; machines for use in industry in the field of electronics, integrated... |
