2023
|
Invention
|
Method for forming a semiconductor device structure and related semiconductor device structures. ... |
|
Invention
|
Method of depositing vanadium metal, structure, device and a deposition assembly.
The current di... |
|
Invention
|
Substrate handling device with adjustable joints.
An adjustable joint for insertion into a linka... |
|
Invention
|
Method and device for depositing silicon onto substrates.
A method for forming a layer on a subs... |
|
Invention
|
Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposi... |
|
Invention
|
Semiconductor processing chamber with filament lamps having nonuniform heat output.
An arrangeme... |
|
Invention
|
Selective passivation and selective deposition.
Methods for selective deposition are provided. M... |
|
Invention
|
Cyclical deposition method and apparatus for filling a recess formed within a substrate surface. ... |
|
Invention
|
Method and apparatus for transmittance measurements of large articles.
Methods and apparatus for... |
|
Invention
|
Method for filling a gap in a three-dimensional structure on a semiconductor substrate.
This app... |
|
Invention
|
Methods for forming a transition metal niobium nitride film on a substrate by atomic layer deposi... |
|
Invention
|
Methods for forming a metal silicate film on a substrate in a reaction chamber and related semico... |
|
Invention
|
Liquid vaporizer.
A semiconductor processing device is disclosed. The semiconductor device inclu... |
|
Invention
|
Methods for depositing gap filling fluids and related systems and devices.
Methods and systems f... |
|
P/S
|
Machines for the assembly and packaging of electronic chips; machines for manufacturing semicondu... |
|
P/S
|
Machines for the assembly and packaging of electronic semiconductor chips; machines for manufactu... |
|
Invention
|
Transition metal deposition processes and a deposition assembly.
The current disclosure relates ... |
|
Invention
|
Methods and assemblies for selectively depositing transition metals.
The disclosure relates to m... |
|
Invention
|
Reaction chamber component, deposition apparatus provided with such component and method of prote... |
|
Invention
|
Method of forming a si-comprising epitaxial layer selectively on a substrate.
A method for formi... |
|
Invention
|
Methods for forming mandrels and spacers, related structures, and systems.
Methods for patternin... |
|
Invention
|
System and apparatus for a lift pin.
A lift pin assembly includes a holder to engage and secure ... |
|
Invention
|
Flow control arrangements, semiconductor processing systems having flow control arrangements, and... |
|
Invention
|
System and apparatus for a reaction chamber.
Various embodiments of the present technology may p... |
|
Invention
|
Chamber arrangements, semiconductor processing systems having chamber arrangements, and related m... |
|
Invention
|
Method, assembly and system for gas injection and control.
Methods, systems, and assemblies suit... |
|
Invention
|
Method, assembly and system for gas injection.
Methods, systems, and assemblies suitable for gas... |
|
Invention
|
Method and systems for forming device structures including high-k dielectric layers and related d... |
|
Invention
|
Substrate processing method.
A substrate processing method includes providing, in a reaction spa... |
|
Invention
|
Substrate processing method.
A method of processing a substrate having a gap includes loading th... |
|
Invention
|
Substrate processing method.
A method of processing a substrate is disclosed, the method includi... |
|
Invention
|
Substrate processing apparatus.
A substrate processing apparatus configured to from a layer on a... |
|
Invention
|
Method of forming material within a recess.
Methods and systems of forming material within a rec... |
|
Invention
|
Substrate processing method.
Provided is a method of efficiently forming a dense and solid silic... |
|
Invention
|
Methods and apparatus for a susceptor lift tool.
Embodiments of the present invention provide a ... |
|
Invention
|
System for processing semiconductor wafer storage cassettes, combinations, and method of transpor... |
|
Invention
|
Wafer boat and a method for forming layer on a plurality of substrates.
A wafer boat and a metho... |
|
Invention
|
Method for forming layer on different-density pattern regions.
A method for forming a layer on a... |
|
Invention
|
Substrate processing apparatus.
A substrate processing apparatus may be presented. The apparatus... |
|
Invention
|
Pressure-based sensor system for precursor level measurement and method therefor.
A pressure-bas... |
|
Invention
|
Method of forming treated silicon-carbon material.
Methods and systems of forming treated silico... |
|
Invention
|
Semiconductor manufacturing monitoring process.
The invention provides in method and systems for... |
|
Invention
|
Capacitive sensor system for precursor level measurement and method therefor.
In the present des... |
|
Invention
|
Substrate processing method.
Provided is a method for forming a TiO2—SiO2 laminated layer for su... |
|
Invention
|
Method and a substrate processing apparatus for forming an epitaxial stack on a plurality of subs... |
|
Invention
|
Thermal atomic layer etching processes.
Thermal atomic layer etching processes are disclosed. In... |
|
P/S
|
Machines for manufacturing semiconductors, including parts
and fittings therefor; semiconductor ... |
|
P/S
|
Machines for manufacturing semiconductors, including parts and fittings therefor; semiconductor m... |
|
Invention
|
Method of selectively forming phosphorous-doped epitaxial material on a surface.
Methods and sys... |
|
Invention
|
Selective deposition of silicon oxide on metal surfaces.
Methods for selective deposition of sil... |
2022
|
P/S
|
Maintenance and repair of products for use in the manufacturing process for semiconductors, integ... |
2021
|
P/S
|
Chemical source material for the deposition of thin film layers upon semiconductor wafers and sub... |
2020
|
Invention
|
Methods for filling a gap feature on a substrate surface and related semiconductor structures.
M... |
|
Invention
|
Electrode for semiconductor processing apparatus |
|
P/S
|
Machines for the assembly and packaging of electronic chips;
machines for manufacturing semicond... |
2017
|
P/S
|
Machines and machine tools, namely semiconductor wafer processing equipment, including thermal tr... |
|
P/S
|
Chemical source material for the deposition of thin film
layers upon semiconductor wafers and su... |
2016
|
P/S
|
Semiconductor manufacturing machines; semiconductor manufacturing machines and systems composed o... |
|
P/S
|
Apparatus for the manufacturing of semiconductors, including
parts and fittings therefor. |
|
P/S
|
Semiconductor manufacturing machines and machine tools and
parts thereof. |
2015
|
P/S
|
Process equipment for the chemical treatment of
semiconductor wafers by means of a gas phase pro... |
2014
|
P/S
|
Semiconductor wafer processing reactors for the chemical treatment and the thermal treatment of s... |
|
P/S
|
Process equipment for the chemical treatment of
semiconductor wafers; chemical reactors for the ... |
|
P/S
|
Mechanical machines for the semiconductor industry,
especially for the production of semiconduct... |
2011
|
P/S
|
Mechanical machines for use in the semiconductor industry, namely, for the manufacture of semicon... |
|
P/S
|
Mechanical machines for use in the semiconductor industry,
particularly for the manufacture of s... |
2009
|
P/S
|
Chemical source material for the deposition of thin films in the manufacturing of semiconductors |
2004
|
P/S
|
Machines and machine tools, namely semi-conductor wafer processing equipment, including thermal t... |
|
P/S
|
Machines and machine tools, namely semi-conductor wafer
processing equipment, including thermal ... |
2002
|
P/S
|
Semiconductor wafer processing equipment, namely thermal
treatment reactors; chemical vapor depo... |
|
P/S
|
CHEMICALS FOR USE IN THIN FILM DEPOSITION IN THE MANUFACTURE OF SEMICONDUCTORS |
|
P/S
|
Chemical source material for the deposition of thin film in
the manufacturing of semi-conductors. |
|
P/S
|
Equipment for the assembly and packaging of electronic
chips. Semiconductor wafer processing equ... |
|
P/S
|
Equipement for the assembly and packaging of electronic
chips. Semiconductor wafer processing eq... |
2001
|
P/S
|
Chemicals being basic materials for applying thin layers,
used in the manufacturing of semicondu... |
|
P/S
|
Mechanical machines for use in the manufacturing of semiconductors and the deposition of thin lay... |
|
P/S
|
Mechanical apparatus for the manufacture of semi-conductors;
electronically controlled apparatus... |
|
P/S
|
[ Semiconductors and parts therefor; ] chemical reactors for depositing layer on a silicon wafer ... |