Lam Research Corporation

États‑Unis d’Amérique


 
Quantité totale PI 4 723
Quantité totale incluant filiales 5 478 (+ 827 pour les filiales)
Rang # Quantité totale PI 218
Note d'activité PI 4,1/5.0    3 164
Rang # Activité PI 193
Activité incl filiales 3,9/5.0    3 300
Symbole boursier
ISIN US5128071082
Capitalisation 59,900M  (USD)
Industrie Semiconductor Equipment & Materials
Secteur Technology
Classe Nice dominante Machines et machines-outils

Brevets

Marques

2 727 94
0 0
1 834 65
3
 
Dernier brevet 2024 - Doped or undoped silicon carbide...
Premier brevet 1980 - Auto-zero system for pressure tr...
Dernière marque 2024 - GALILEO
Première marque 1991 - CONCEPT ONE

Filiales

4 subsidiaries with IP (791 patents, 36 trademarks)

33 subsidiaries without IP

 S'inscrire grtuitement pour accéder à la liste des filiales

Industrie (Classification de Nice)

Derniers inventions, produits et services

2024 P/S Semiconductor manufacturing machines; Semiconductor substrates manufacturing machines; Semiconduc...
2023 P/S Computer services, namely, providing on-line facilities for real-time interaction with other com...
P/S Semiconductor manufacturing machines; semiconductor substrates manufacturing machines; semicondu...
P/S Recorded computer software comprising a library of 3d models and design tools for computer aided...
Invention Doped or undoped silicon carbide deposition and remote hydrogen plasma exposure for gapfill. A d...
Invention Control of wafer bow in multiple stations. A system for controlling of wafer bow in plasma proce...
Invention Carrier ring designs for controlling deposition on wafer bevel/edge. Various carrier ring design...
Invention Protective coating for electrostatic chucks. An ElectroStatic Chuck (ESC) including a chucking s...
Invention Non-elastomeric, non-polymeric, non-metallic membrane valves for semiconductor processing equipme...
Invention Real-time control of temperature in a plasma chamber. Systems and methods for real-time control ...
Invention Precursors for deposition of molybdenum-containing films. Molybdenum-containing films are deposi...
Invention Selective processing with etch residue-based inhibitors. Selective deposition of a sacrificial m...
Invention Tin oxide thin film spacers in semiconductor device manufacturing. Thin tin oxide films can be u...
Invention Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge r...
Invention Process tool for dry removal of photoresist. Dry development or dry removal of metal-containing ...
Invention Electrostatic chuck for use in semiconductor processing. A semiconductor substrate processing ap...
Invention Systems and methods for reverse pulsing. Systems and methods for reverse pulsing are described. ...
Invention Methods and apparatus for controlling plasma in a plasma processing system. Methods and apparatu...
P/S Computer hardware and recorded software systems for the installation, operation, maintenance, and...
Invention Dual-channel monoblock gas manifold. This disclosure pertains to compact, mono-block manifolds fo...
Invention Bond protection for an electrostatic chuck in a plasma processing chamber. An electrostatic chuck...
Invention Multichannel heated gas delivery system. A gas conditioning assembly comprising a first block str...
Invention Selective sige etching using thermal f2 with additive. 2222. Use of the additive produces a more ...
Invention Reducing thermal bow shift. Provided are methods and structures for keeping the integrity of laye...
Invention Conductive backside layer for bow mitigation. Provided are methods for keeping a semiconductor wa...
Invention System and method to maintain constant clamping pressure during chamber rebooting and power failu...
Invention Electrodeposition systems. Examples are disclosed that relate to operating an electrodeposition s...
Invention High aspect ratio carbon etch with simulated bosch process. Various embodiments herein relate to ...
Invention Plasma monitoring and plasma density measurement in plasma processing systems. A plasma processin...
Invention Wedge seal for efem frame and panel seams. A seal arrangement for an enclosure in a substrate pro...
Invention Precise feedback control of bias voltage tailored waveform for plasma etch processes. A bias elec...
Invention Edge ring voltage and phase measurement and control for substrate processing systems. A voltage c...
Invention Fast frequency tracking control for radiofrequency power amplifiers with rapidly changing plasma ...
Invention Apparatus and method for modulating spatial distribution of plasma and ion energy using frequency...
Invention Improved pedestals for substrate processing systems. A substrate support includes at least three ...
Invention Plasma detection in semiconductor fabrication apparatuses. Methods and systems for detecting plas...
Invention End effector. An end effector for supporting a wafer, the end effector having a temperature senso...
Invention Mobile sensor devices for semiconductor fabrication equipment. Systems and techniques for obtaini...
Invention High-efficiency led substrate heater for deposition applications. An optical array arranged in a ...
Invention Led substrate heater for deposition applications. A pedestal configured to deposit material on a ...
P/S Ceramic parts for machines; parts for machines for the deposition of materials; ceramic tools fo...
Invention Isolation valve. In some examples, an isolation valve is provided to isolate gasses and plasmas i...
Invention Metal-oxide varistor (mov) based surge protection circuit for plasma processing chamber. A system...
P/S Recorded computer software comprising a library of 3d models and design tools for computer aided ...
P/S Computer services, namely, providing on-line facilities for real-time interaction with other comp...
P/S Consultation services in the field of software for designing and manufacturing semiconductors and...
P/S Ceramic tools for semiconductor manufacturing machines, semiconductor substrates manufacturing ma...
2022 P/S Components for pulsed laser deposition machines for use in the manufacture of semiconductors, nam...
P/S Apparatus (machines) for the production of semiconductors and micro-electronic semi-conductor pr...
Invention Integration of fully aligned via through selective deposition and resistivity reduction. Methods...
Invention Control of metallic contamination from metal-containing photoresist. Various techniques for cont...
P/S Components for semiconductor manufacturing machines, namely, electrodes, calibrators, actuators,...
Invention C-shroud modification for plasma uniformity without impacting mechanical strength or lifetime of ...
Invention Processing parts using solid-state additive manufacturing. Semiconductor-processing chamber comp...
Invention Systems and techniques for optical measurement of thin films. Methods provided herein may includ...
Invention Molybdenum deposition in features. Provided are deposition processes including deposition of a t...
2021 P/S Components of equipment for the manufacture, processing, and fabrication of semiconductors, name...
Invention Adaptive model training for process control of semiconductor manufacturing equipment. Various em...
Invention High selectivity, low stress, and low hydrogen carbon hardmasks in low-pressure conditions with w...
Invention Metal etch. A method for etching a metal containing material is provided. The metal containing m...
Invention Coated conductor for heater embedded in ceramic. Various embodiments herein relate to techniques...
Invention Clamshell cable guide
P/S Components for semiconductor manufacturing machines, namely, electrodes, pedestals in the nature ...
P/S Replacement components for semiconductor manufacturing machines; replacement components for semi...
P/S Components of equipment for the manufacture, processing, and fabrication of semiconductors, namel...
P/S Measurement apparatus and instruments for use in semiconductor manufacturing, semiconductor subs...
Invention Collaborative robot system on a mobile cart with a chamber docking system. A robot system for se...
P/S Replacement components for semiconductor manufacturing machines; Replacement components for semic...
2020 P/S Measurement apparatus and instruments for use in semiconductor manufacturing, semiconductor subst...
Invention Sacrificial protection layer for environmentally sensitive surfaces of substrates. A method for ...