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2024
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Invention
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Optical system, test device, lithography apparatus, arrangement and method.
An optical system co... |
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Invention
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Method for depositing a cover layer, euv lithography system and optical element.
A method of dep... |
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Invention
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Method, optical system, test device and arrangement.
A method for checking an interface for the ... |
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Invention
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Electron microscope for examining a specimen.
An electron microscope serves for examining a spec... |
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P/S
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applications and instruments in the field of semiconductor measurement and inspection solutions. |
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P/S
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Applications and instruments in the field of semiconductor measurement and inspection solutions |
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Invention
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Optical system, projection exposure system and method.
An optical system for a projection exposu... |
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Invention
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Method for imaging with a scanning electron microscope and scanning electron microscope for carry... |
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Invention
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Optical system, lithography apparatus and method.
A lithography optical system comprises: actuat... |
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Invention
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System to inspect, modify or analyze a region of interest of a sample by charged particles, set o... |
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Invention
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Method for measuring photomasks for semiconductor lithography.
A method for measuring photomasks... |
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Invention
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Optical system, lithography apparatus and method.
An optical system comprises: a plurality of op... |
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Invention
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High resolution, low energy electron microscope for providing topography information and method o... |
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Invention
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Multi-mirror array.
A multi-mirror array comprises a carrier structure and a multiplicity of mir... |
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Invention
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Methods and devices for extending a time period until changing a measuring tip of a scanning prob... |
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Invention
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Apparatus and method for analyzing an element of a photolithography process with the aid of a tra... |
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Invention
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Optical component group, in particular for use in an illumination device of a microlithographic p... |
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Invention
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Method for determining a position of a mirror.
A method for determining a position of a mirror o... |
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Invention
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Euv illumination device and method for operating a microlithographic projection exposure apparatu... |
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Invention
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Sample preparation for charged particle beam imaging. A method of preparing a sample for charged ... |
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Invention
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Peltier module, assembly, and apparatus for mask inspection.
The invention relates to a Peltier ... |
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Invention
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Adaptive optical module for a microlithographic projection exposure apparatus. An adaptive optica... |
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Invention
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Sensor arrangement for arrangement on a measurement chamber, apparatus for qualifying a mask and ... |
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Invention
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Creating an electric field when processing a lithography object. The invention relates to process... |
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Invention
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Method and measuring device for inspecting photomasks, and euv camera.
A method for inspecting p... |
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Invention
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Method for aligning two components and method for optical contact bonding two components. The inv... |
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Invention
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Optical modules for the ultraviolet wavelength range. The invention relates to an optical module ... |
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Invention
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Method and systems for balancing charges on a surface of an object comprising integrated circuit ... |
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Invention
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Optical assembly, optical system and projection exposure apparatus. An optical assembly (102) for... |
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Invention
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Imaging optical arrangement to image an object illuminated by x-rays.
An imaging optical arrange... |
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Invention
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Optical system and projection exposure system. The invention relates to an optical system (100A, ... |
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Invention
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3d volume inspection method and method of configuring of a 3d volume inspection method. A method ... |
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Invention
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Device and method for heating a mirror, assembly composed of a heating device and an euv mirror, ... |
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Invention
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Test system with a vacuumisable test chamber. The invention relates to a test system (1) comprisi... |
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Invention
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Method for the interferometric determination of the surface shape of a test object. The invention... |
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Invention
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Computer implemented method for the detection of defects in an object comprising integrated circu... |
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Invention
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System having a lithography apparatus and a number of electronics modules, and method for operati... |
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Invention
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Method for examining samples pertaining to microlithography.
Disclosed is a method for examining... |
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Invention
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Optical element having a polishing layer, lithography apparatus comprising the optical element, a... |
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Invention
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Computer implemented method for the detection of defects in an imaging dataset of an object compr... |
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Invention
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Measurement apparatus, method for operating a mask-metrology measurement apparatus, and computer ... |
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Invention
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Mechatronic element, mirror, mirror arrangement and method for production of same. The invention ... |
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Invention
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Chromatically corrected imaging illumination optical unit for use in a lithographic projection ex... |
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Invention
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Methods and devices for the contactless setting of an electro-static charge of a sample. The pres... |
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Invention
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Method for producing a system comprising two sub-assemblies. The invention relates to a method fo... |
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Invention
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Mask-metrology measuring device and method for examining a photomask. The invention relates to a ... |
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Invention
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Optical component. The invention relates to an optical component (100) comprising a mirror elemen... |
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Invention
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Module for a projection exposure apparatus, method, and projection exposure apparatus. The invent... |
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Invention
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Device and method for reducing contamination in an optical system for microlithography. The inven... |
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2023
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Invention
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Apparatus and method for removing a single particulate from a substrate.
The present application... |
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Invention
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Method for producing a mirror assembly, and coating system. The invention relates to a method for... |
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Invention
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3d volume inspection method and method of configuring of a 3d volume inspection method.
A method... |
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2022
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P/S
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Recorded data; web applications and server software;
utility, security and cryptographic softwar... |
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P/S
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Recorded data in the nature of downloadable data files featuring semiconductor industry solutions... |
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2020
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P/S
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Focused ion beam workstations, comprising of scanning ion and electron microscopes, computer soft... |
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P/S
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Focused ion beam systems/instruments for scientific
purposes; software for focused ion beam syst... |
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P/S
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Focused ion beam apparatus comprised of computer hardware and recorded computer software to perfo... |
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P/S
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Software platform for the visualization and analysis of
semiconductor image data. |
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P/S
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Apparatus and instruments for aerial photogrammetry of
lithography photomasks in the field of se... |
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2019
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P/S
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Apparatus and instruments for aerial photogrammetry of lithography photomasks in the field of sem... |
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2018
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P/S
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Microscopes and parts thereof; x-ray microscopes and parts thereof; downloadable software used fo... |
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2014
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P/S
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Maintenance, repairing, installation and replacement of
hardware for semiconductor equipment. Ma... |
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P/S
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Installation, maintenance and repair of semiconductor equipment for others; replacement of worn o... |
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P/S
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Server for linking instruments used in the semiconductor field and for analyzing and evaluating d... |
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P/S
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Computer server for linking instruments used in the
semiconductor field and for analyzing and ev... |
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2011
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P/S
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Laser apparatus for correcting the precision in the position
of photomask structures. |
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2009
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P/S
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Optical inspection apparatus, namely, semiconductor mask inspection apparatus and parts thereof |
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P/S
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Mask inspection systems. |
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2008
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P/S
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measuring instruments to measure positions of structures on photomasks; computer software for use... |
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2005
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P/S
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Apparatus for repair of masks used for manufacturing
semi-conductor structures and their parts (... |
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P/S
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mask repair tools used in the semiconductor industry |
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2002
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P/S
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Optical apparatus and instruments, lenses for the semiconductor industry, apparatus and instrumen... |
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1998
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P/S
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Optical apparatus and instruments; objectives. Lighting devices. |
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1997
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P/S
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lens objectives for use with wafersteppers and illuminators |
