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2023
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Invention
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Work polishing apparatus and work polishing method.
In a work polishing apparatus, a polishing h... |
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Invention
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Double-sided polishing apparatus. A double-sided polishing apparatus includes: a lower surface pl... |
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Invention
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Polishing apparatus and polishing method.
An object is to provide a polishing apparatus and a po... |
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Invention
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Polishing device, and polishing method. The present invention addresses the problem of providing ... |
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2022
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Invention
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Production apparatus for metal oxide single crystal and production method for metal oxide single ... |
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Invention
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Work processing apparatus.
A work processing apparatus performs processing of a surface to be pr... |
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2021
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Invention
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Production apparatus for gallium oxide crystal capable of preventing harmful substances formed in... |
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Invention
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Production apparatus for gallium oxide crystal and production method for gallium oxide crystal.
... |
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Invention
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Production apparatus for gallium oxide crystal.
There is provided a production apparatus of a ga... |
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Invention
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Polishing head and single-sided polishing method for wafer. The present invention provides a poli... |
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Invention
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Gallium oxide crystal manufacturing device. A gallium oxide crystal manufacturing device includes... |
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Invention
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Crucible for growing metal oxide single crystal. A crucible for growing a metal oxide single crys... |
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2020
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Invention
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Non-contact-type apparatus for measuring wafer thickness.
A non-contact-type apparatus for measu... |
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Invention
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Non-contact-type wafer thickness measurement device. The present invention is characterized by be... |
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Invention
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Two-side polishing device. The present invention is a two-side polishing device equipped with: a ... |
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2018
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Invention
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Apparatus for producing a single crystal of a metal oxide comprising a pt-rh alloy heater coated ... |
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Invention
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Work polishing method and work polishing apparatus. The polishing apparatus comprises: a dressing... |
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2017
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Invention
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Work polishing head. The polishing head comprises: a head main body part; a carrier being connect... |
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Invention
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Apparatus and method for producing gallium oxide crystal. The apparatus for producing a gallium o... |
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Invention
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Nozzle and work polishing apparatus. A nozzle according to the invention includes a liquid flow p... |
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2016
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Invention
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Method of polishing work and method of dressing polishing pad. The method of the present inventio... |
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Invention
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Work processing apparatus and liquid chemical bag for the same. The work processing apparatus of ... |
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Invention
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Polishing apparatus with a waste liquid receiver. A polishing apparatus including: a turntable wi... |
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Invention
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Polishing apparatus. The present invention is a polishing apparatus equipped with a surface plate... |
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Invention
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Polishing apparatus for a work with mechanical polishing function and chemical polishing function... |
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Invention
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Dressing apparatus and dressing method of polishing pad of double-side polishing apparatus. To pr... |
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2015
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Invention
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Surface plate transport dolly. The present invention is a surface plate transport dolly that is f... |
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Invention
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Polishing apparatus and wafer polishing method. A polishing apparatus which is an index system po... |
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Invention
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Polishing device and wafer polishing method. The present invention is an index-type polishing dev... |
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Invention
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Polishing apparatus. A polishing apparatus includes: a plurality of polishing heads for holding a... |
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Invention
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Polishing device. The present invention is a polishing device equipped with multiple polishing he... |
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Invention
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Method for polishing work and work polishing apparatus. The method of the present invention is ca... |
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2013
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Invention
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Wafer polishing apparatus. The wafer polishing apparatus comprises a polishing plate, a polishing... |
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Invention
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Method of manufacturing semiconductor wafers. A method of manufacturing semiconductor wafers whic... |
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2012
|
Invention
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Method for adhering works and work adhering apparatus.
The method for adhering works is capable ... |
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2011
|
Invention
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Double-side polishing apparatus. In the double-side polishing apparatus, one end part of a slurry... |
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Invention
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Polishing head capable of continuously varying pressure distribution between pressure regions for... |
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Invention
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Method and apparatus for dressing polishing pad. The method of the present invention are capable ... |
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Invention
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Polishing head and polishing apparatus. A polishing head including, below a polishing head body, ... |
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Invention
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Abrasive head and abrading device. Disclosed is an abrasive head wherein in the lower portion of ... |
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2010
|
Invention
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Equipment for growing sapphire single crystal.
The equipment for growing a sapphire single cryst... |
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Invention
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Polishing apparatus.
The polishing apparatus is capable of improving accuracy of polishing a wor... |
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Invention
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Method and equipment for producing sapphire single crystal.
The method is capable of producing a... |
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Invention
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Double-side polishing apparatus and method for polishing both sides of wafer. The double-side pol... |
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Invention
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Equipment and method for cleaning polishing cloth.
The equipment for cleaning polishing cloth is... |
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Invention
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Method of preparing polishing head and polishng apparatus. The present invention relates to a met... |
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2009
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Invention
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Polishing head and polishing apparatus. A polishing head for holding a workpiece when a surface o... |
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Invention
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Method for manufacturing polishing head and polishing apparatus.
A method for manufacturing a po... |
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2008
|
Invention
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Polishing head and polishing apparatus having the same. The present invention is a polishing head... |
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2007
|
Invention
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Polishing head, polishing apparatus and method for demounting workpiece. A polishing head having ... |
