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2024
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Invention
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Electronic device manufacturing method, laser device, and wavelength sequence calculation system.... |
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Invention
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Laser system, pulse laser light generating method, and electronic device manufacturing method.
A... |
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Invention
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Optical pulse stretcher, laser apparatus, and electronic device manufacturing method.
An optical... |
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Invention
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Laser processing system, laser processing method, and electronic device manufacturing method.
A ... |
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Invention
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Pulse stretcher and electronic device manufacturing method.
A pulse stretcher includes a beam sp... |
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Invention
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Laser apparatus and electronic device manufacturing method.
A laser apparatus includes an oscill... |
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Invention
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Electronic device manufacturing method and lithography control processor.
An electronic device m... |
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Invention
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Laser processing method and laser processing system.
A laser processing method includes a first ... |
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Invention
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Gas laser apparatus, gas laser apparatus maintenance method, and electronic device manufacturing ... |
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Invention
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Gas laser device and electronic device manufacturing method.
A gas laser device includes a chamb... |
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Invention
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Laser apparatus and electronic device manufacturing method.
A laser apparatus includes a first s... |
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Invention
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Gas laser device and electronic device manufacturing method.
A gas laser device includes a laser... |
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2023
|
Invention
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Euv light generation apparatus and electronic device manufacturing method.
An EUV light generati... |
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Invention
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Laser processing apparatus, laser processing method, and electronic device manufacturing method. ... |
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Invention
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Bypass apparatus, laser apparatus, and electronic device manufacturing method.
A bypass apparatu... |
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Invention
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Performance prediction method and training method. A performance prediction method according to o... |
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Invention
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Display method and display device. One aspect of the present disclosure pertains to a display met... |
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Invention
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Performance prediction method and training method. One aspect of the present disclosure pertains ... |
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Invention
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Control method of discharge-excitation type laser device, discharge-excitation type laser device,... |
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Invention
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Tilt stage, extreme ultraviolet light generation apparatus, and electronic device manufacturing m... |
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Invention
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Ultraviolet laser device and electronic device manufacturing method.
An ultraviolet laser device... |
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Invention
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Target supply device and electronic device manufacturing method.
A target supply device is confi... |
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Invention
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Extreme ultraviolet light generation chamber device and electronic device manufacturing method.
... |
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Invention
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Extreme ultraviolet light generation system and electronic device manufacturing method.
An extre... |
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Invention
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Extreme ultraviolet light generation apparatus and electronic device manufacturing method.
An ex... |
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Invention
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Laser chamber apparatus, gas laser apparatus, and method for manufacturing electronic device. A l... |
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Invention
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Gas laser apparatus and method for manufacturing electronic device. This gas laser apparatus comp... |
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Invention
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Laser apparatus, method for controlling laser apparatus, and method for manufacturing electronic ... |
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Invention
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Gas laser device and method for manufacturing electronic device. This gas laser device amplifies ... |
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Invention
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Gas laser apparatus and electronic device manufacturing method. A gas laser apparatus according t... |
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Invention
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Discharge-excited laser device, method for controlling discharge-excited laser device, and method... |
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Invention
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Gas laser device, method for controlling temperature of laser gas, and method for manufacturing e... |
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Invention
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Laser chamber apparatus, gas laser apparatus, and method for manufacturing electronic device. Thi... |
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Invention
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Degradation estimation method, laser device, and electronic device manufacturing method. The pres... |
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Invention
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Laser chamber device, gas laser device, and method for manufacturing an electronic device. A lase... |
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Invention
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Gas laser device discharge chamber and electronic device manufacturing method. Provided is a gas ... |
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Invention
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Timestamping method and laser device. A timestamping method for applying timestamps to a pluralit... |
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Invention
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Spectrum measuring instrument, laser device, and method for identifying peak position of referenc... |
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2022
|
Invention
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Exposure system and method for manufacturing electronic device. An exposure system comprising an ... |
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Invention
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Laser processing apparatus, method for controlling laser processing apparatus, and method for man... |
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Invention
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Laser machining system, laser machining method, and method for manufacturing electronic device. O... |
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Invention
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Laser device and method for manufacturing electronic device. A laser device according to one aspe... |
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Invention
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Discharge electrode, production method for discharge electrode, and production method for electro... |
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Invention
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Gas laser device, and method for manufacturing electronic device. This gas laser device comprises... |
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Invention
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Chamber for gas laser apparatus, gas laser apparatus, and method for manufacturing electronic dev... |
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Invention
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Wavelength conversion system, solid laser system, and electronic device manufacturing method. R2R... |
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P/S
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Laser apparatus, namely, a laser machine for semiconductor manufacturing; extreme ultraviolet lig... |
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P/S
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Laser apparatus for semiconductor manufacturing; extreme
ultraviolet light generation apparatus ... |
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2018
|
P/S
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Computer software platforms for managing semi-conductor manufacturing machines; computer software... |
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P/S
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Computer software platforms used for semi-conductor
manufacturing machines; computer software us... |
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2016
|
P/S
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Laser apparatus namely, a laser machine for semiconductor manufacturing; extreme ultraviolet ligh... |
