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2023
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P/S
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Semiconductor wafer processing equipment |
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P/S
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Business consulting and project management services in the field of designing, building, and vali... |
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P/S
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Treatment of materials, namely, mechanical, chemical and physical treatment of semiconductor mate... |
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P/S
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Hardware and recorded software for improving SEM overlay
designs in semiconductor wafer manufact... |
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P/S
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Software algorithm that utilizes CAD segmentation to enhance
defect detection. |
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P/S
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Semiconductor manufacturing machines used for digital lithography-based patterning Recorded softw... |
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P/S
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Recorded computer programs for use in cancer diagnosis;
recorded computer applications using art... |
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P/S
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Semiconductor wafer processing equipment, namely,
semiconductor manufacturing machines incorpora... |
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P/S
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Lithium ion batteries; lithium ion battery separator films Treatment and processing of lithium io... |
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P/S
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Semiconductor manufacturing equipment for depositing dielectric films and coatings |
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P/S
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Semiconductor wafer metrology equipment |
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P/S
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Computer simulation software for use in semiconductor wafer
processing equipment operator training. |
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P/S
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Recorded software for use in semiconductor manufacturing,
namely, SQL server configurations for ... |
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P/S
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Recorded computer software and algorithms used in
controlling ion implanter dose delivery in sem... |
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P/S
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Battery films; lithium ion battery films Treatment and processing of battery films |
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Invention
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High-density substrate processing systems and methods.
Exemplary substrate processing systems ma... |
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P/S
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Hardware and recorded software for improving SEM overlay designs in semiconductor wafer manufactu... |
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Invention
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Methods and systems for cleaning high aspect ratio structures.
Embodiments of the present disclo... |
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Invention
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Multiple reflectometry for measuring etch parameters.
A system includes a memory, and at least o... |
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Invention
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Rf grounding configuration for pedestals.
Embodiments of the present disclosure generally relate... |
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Invention
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Method for fabricating chamber parts.
One embodiment of the disclosure provides a method of fabr... |
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Invention
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External substrate system rotation in a semiconductor processing system.
A method and apparatus ... |
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Invention
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Methods of protecting aerospace components against corrosion and oxidation.
Embodiments of the p... |
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Invention
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Ion beam sputtering with ion assisted deposition for coatings on chamber components.
A method in... |
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Invention
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Tribological properties of diamond films.
Methods to manufacture integrated circuits are describ... |
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Invention
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Ultra-thin ceramic coating on separator for batteries.
Implementations of the present disclosure... |
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Invention
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Electroplating system.
An electroplating system has a vessel assembly holding an electrolyte. A ... |
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Invention
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Abatement and strip process chamber in a load lock configuration.
Examples of the present invent... |
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P/S
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Semiconductor wafer processing equipment and semiconductor
wafer processing equipment components... |
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P/S
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Software algorithm that utilizes CAD segmentation to enhance defect detection |
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2022
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P/S
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Semiconductor wafer processing equipment, namely, hardware to control and modify polishing pad su... |
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P/S
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Semiconductor wafer processing equipment component, namely,
source coil for plasma etching system. |
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P/S
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Recorded software and smart algorithms used in the
semiconductor manufacturing industry to reduc... |
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P/S
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Dielectric films and coatings for use in semiconductor
manufacturing. |
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P/S
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Densified, seam-free silicon nitride dielectric gapfill film
used in semiconductor manufacturing. |
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Invention
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Chromatic focal shift compensation methods and systems.
Methods and systems of correcting chroma... |
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Invention
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Methods and precursors for selective deposition of metal films.
Methods and precursors for selec... |
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Invention
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Gate all around transistor architecture with fill-in dielectric material.
Semiconductor devices ... |
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Invention
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Monitoring of deposited or etched film thickness using image-based mass distribution metrology.
... |
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Invention
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Artificial intelligence-based hyperspectrally resolved detection of anomalous cells. According to... |
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Invention
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Chromatic focal shift compensation methods and systems. Methods and systems of correcting chromat... |
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Invention
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Artificial intelligence-based hyperspectrally resolved detection of anomalous cells.
According t... |
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P/S
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Optical devices, namely, metasurface optical devices Manufacturing services of metasurface optica... |
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Invention
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High density plasma enhanced process chamber. The present disclosure is directed to a showerhead ... |
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Invention
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Accelerating preventative maintenance recovery and recipe optimizing using machine-learning-based... |
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Invention
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Nand cell structure with charge trap cut. Described is a memory device including a plurality of m... |
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Invention
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Substrate position calibration for substrate supports in substrate processing systems. Methods an... |
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Invention
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Multi-antenna unit for large area inductively coupled plasma processing apparatus. Embodiments of... |
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P/S
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Recorded computer software and algorithms used in controlling ion implanter dose delivery in semi... |
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Invention
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Nand cell structure with charge trap cut.
Described is a memory device including a plurality of ... |
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Invention
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Porous plug for electrostatic chuck gas delivery. Porous plugs for gas delivery in substrate supp... |
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P/S
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Computer simulation software for use in semiconductor wafer processing equipment operator training |
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Invention
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Systems and methods for the in-line measurement of alkali metal- or alkali ion-containing structu... |
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P/S
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Recorded software for use in semiconductor manufacturing, namely, SQL server configurations for m... |
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P/S
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Wafer processing equipment, namely a system for metal
physical vapor deposition (PVD) processes. |
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Invention
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Method and apparatus for realtime wafer potential measurement in a plasma processing chamber. Emb... |
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Invention
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Ion energy control on electrodes in a plasma reactor. Embodiments provided herein generally inclu... |
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Invention
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Electrostatic chuck with detachable shaft. Electrostatic chucks (ESCs) for plasma processing cham... |
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Invention
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Method to eliminate first wafer effects on semiconductor process chambers. Embodiments disclosed ... |
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P/S
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Recorded computer programs for use in cancer diagnosis; recorded computer applications using arti... |
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Invention
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Electrostatic chuck with detachable shaft.
Electrostatic chucks (ESCs) for plasma processing cha... |
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Invention
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Chamber and methods of cooling a substrate after baking. A method and apparatus for performing po... |
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Invention
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Chamber and methods of cooling a substrate after baking.
A method and apparatus for performing p... |
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P/S
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Semiconductor wafer processing equipment and semiconductor wafer processing equipment components,... |
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P/S
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Densified, seam-free dielectric gapfill film used in
semiconductor manufacturing. |
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P/S
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Metal oxide dielectric coatings for use in semiconductor
manufacturing. |
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P/S
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Semiconductor wafer processing equipment component, namely, source coil for plasma etching system |
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P/S
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Dielectric films and coatings for use in semiconductor manufacturing |
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P/S
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Semiconductor manufacturing machines |
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Invention
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Apparatus and methods for reducing substrate cool down time.
A method and apparatus for reducing... |
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2021
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Invention
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Use of adaptive replacement maps in digital lithography for local cell replacement.
Embodiments ... |
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Invention
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Integrated manifold and switches for fluidic movement.
Exemplary spatial genomics systems may in... |
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Invention
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Backpressure monitoring apparatus.
Exemplary backpressure monitoring apparatuses may include a f... |
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Invention
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Electrochemical deposition systems with enhanced crystallization prevention features.
Electroche... |
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Invention
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Growth monitor system and methods for film deposition.
The present disclosure generally relates ... |
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Invention
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Ion energy control on electrodes in a plasma reactor.
Embodiments provided herein generally incl... |
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Invention
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Porous plug for electrostatic chuck gas delivery.
Porous plugs for gas delivery in substrate sup... |
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Invention
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Method and apparatus for realtime wafer potential measurement in a plasma processing chamber.
Em... |
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Invention
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Carrier transport system, vacuum deposition system, and method of carrier transport. A carrier tr... |
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Invention
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High density plasma enhanced process chamber.
The present disclosure is directed to a showerhead... |
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Invention
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Plasma chamber with a multiphase rotating gas cross-flow and peripheral conductance control rings... |
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Invention
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Shield for filament in an ion source.
A Bernas ion source having a shield is disclosed. The shie... |
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Invention
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Wafer edge temperature correction in batch thermal process chamber.
A process kit for use in a p... |
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Invention
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Processes for improving thin-film encapsulation.
A method and apparatus for forming an encapsula... |
