Varian Semiconductor Equipment Associates, Inc.

États‑Unis d’Amérique

 
Quantité totale PI 1 291
Rang # Quantité totale PI 971
Note d'activité PI 3/5.0    182
Rang # Activité PI 3 797
Parent Applied Materials, Inc.
Classe Nice dominante Machines et machines-outils

Brevets

Marques

670 6
0 0
612 0
3
 
Dernier brevet 2023 - Techniques for controlling precu...
Premier brevet 1980 - End point detection method for p...
Dernière marque 2010 - SOLION
Première marque 1999 - VIISTA

Filiales

7 subsidiaries without IP

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Industrie (Classification de Nice)

Derniers inventions, produits et services

2023 Invention Techniques for controlling precursors in chemical deposition processes. An apparatus for control...
2021 Invention Semiconductor manufacturing device with embedded fluid conduits. Provided herein are approaches ...
Invention Techniques and apparatus for elongation patterning using angled ion beams. A method of patternin...
Invention System and methods using an inline surface engineering source. A system having an auxiliary plasm...
Invention Techniques to engineer nanoscale patterned features using ions. A method of patterning a substrat...
2020 Invention Spacer sculpting for forming semiconductor devices. A method may include forming in a substrate a...
Invention In-situ plasma cleaning of process chamber components. Provided herein are approaches for in-situ...
Invention Optical component having variable depth gratings and method of formation. An optical grating comp...
Invention Techniques for controlling precursors in chemical deposition processes. An apparatus for controll...
Invention System and tool for cleaning a glass surface of an accelerator column. A cleaning tool for cleani...
Invention Apparatus and techniques for generating bunched ion beam. An ion implantation system, including a...
Invention Dual cathode ion source. An ion source having dual indirectly heated cathodes is disclosed. Each ...
Invention Device structure for forming semiconductor device having angled contacts. A memory device may inc...
Invention System and method for optimally forming gratings of diffracted optical elements. Optical grating ...
Invention Extreme edge uniformity control. A workpiece processing apparatus allowing independent control of...
Invention Apparatus and techniques for generating bunched ion beam. An apparatus may include a first ground...
Invention System and method for forming diffracted optical element having varied gratings. Embodiments here...
Invention Dynamic random access device including two-dimensional array of fin structures. A method may incl...
Invention Method and apparatus for non line-of-sight doping. A method of doping a substrate. The method may...
Invention Hydrophobic shafts for use in process chambers. A system that reduces the amount of water that en...
2019 Invention Structure and method of forming fin device having improved fin liner. A method for forming a semi...
Invention Method and device isolation structure in finfet. A method of forming a semiconductor device. The ...
Invention Performance improvement of euv photoresist by ion implantation. A method of patterning a substrat...
Invention Filling a cavity in a substrate using sputtering and deposition. A method may include providing ...
Invention Apparatus and techniques for beam mapping in ion beam system. An apparatus for monitoring of an ...
Invention Extraction apparatus and system for high throughput ion beam processing. In one embodiment, an io...
Invention Foam in ion implantation system. Disclosed is a semiconductor processing apparatus including one ...
Invention Novel apparatus and techniques for generating bunched ion beam. An apparatus may include a first ...
Invention Angular control of ion beam for vertical surface treatment. Provided herein are techniques for tr...
Invention Insertable target holder for solid dopant materials. An ion source with an insertable target hold...
Invention Ion source thermal gas bushing. A system for reducing clogging and deposition of feed gas on a ga...
Invention System and method to detect glitches. A glitch monitoring system is disclosed. The glitch monitor...
Invention Anti-reflective coating for transparent end effectors. A workpiece support, such as an end effect...
Invention Techniques, system and apparatus for selective deposition of a layer using angled ions. A method ...
2018 Invention Selective photoresist etching for bridge defect removal. Disclosed are methods for removing bridg...
Invention Silicon carbide substrate heating. A system and method for heating silicon carbide substrates is ...
Invention Gate spacer formation for scaled cmos devices. Disclosed are methods of forming a CMOS device. On...
Invention Conductive beam optics for reducing particles in ion implanter. Provided herein are approaches fo...
2010 Invention Platen to control charge accumulation. An embossed platen to control charge accumulation includes...
P/S Solar cell processing machines and processing equipment, namely, ion implanters
2008 P/S Semiconductor manufacturing machines; Semiconductor wafer processing equipment; Semiconductor waf...
2006 P/S Semiconductor manufacturing equipment, namely, a substrate masking apparatus preferably for use w...
2000 P/S Semiconductor manufacturing machines; logic chip manufacturing machines; memory chip manufacturin...
1999 P/S Semiconductor manufacturing equipment, namely, ion implanters
P/S Semiconductor manufacturing machines, namely, ion implanters