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2024
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Invention
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Substrate processing apparatus, substrate processing system, electrical power supply system, and ... |
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Invention
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Substrate processing apparatus and substrate processing method.
A substrate processing apparatus... |
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Invention
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Plasma processing apparatus.
In an etching method, plasma from a processing gas containing a flu... |
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Invention
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Measuring device, measuring method, and vacuum processing apparatus.
A measuring device for a va... |
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Invention
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Apparatus for transporting substrate, system for processing substrate, and method of transporting... |
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Invention
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Measurement method and measurement system.
A measurement method according to an exemplary embodi... |
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Invention
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Plasma processing system and plasma processing apparatus.
A plasma processing system includes a ... |
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Invention
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Substrate processing method and substrate processing apparatus.
A method includes: supplying a p... |
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Invention
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Substrate processing method and substrate processing system.
A substrate processing apparatus in... |
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P/S
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Semiconductor manufacturing machines and their component
parts and fittings; flat panel display ... |
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P/S
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Semiconductor manufacturing machines and their component parts and fittings; flat panel display m... |
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Invention
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Substrate processing apparatus and control position setting method.
A substrate processing appar... |
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Invention
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Distributor and plasma processing apparatus.
A distributor for distributing electromagnetic wave... |
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Invention
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Substrate processing apparatus.
A substrate processing apparatus includes: a processing containe... |
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Invention
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Mixed activating and reducing agent for bonding.
A method is provided for activating a first sur... |
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Invention
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Method for cell layout. A method of designing a standard cell layout includes determining a perfo... |
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Invention
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Method for cell layout.
A method of designing a standard cell layout includes determining a perf... |
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Invention
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Plasma processing apparatus.
A plasma processing apparatus includes: a processing container; a r... |
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Invention
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Method and apparatus for embedding tungsten into recess formed on substrate.
A method of embeddi... |
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Invention
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Film forming method, method of manufacturing semiconductor device, and processing system.
A film... |
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Invention
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Substrate processing apparatus.
A substrate processing apparatus includes a vacuum chamber; a ro... |
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Invention
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Processing method and processing apparatus.
A processing method includes supplying a halogen-con... |
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Invention
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Plasma treatment device, substrate support part, and method for correcting corrosion of edge ring... |
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Invention
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Substrate processing system and substrate processing method. Provided is a substrate processing s... |
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Invention
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Wall member and plasma processing device. A body of this wall member is provided in the periphera... |
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Invention
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Plasma measuring method and plasma processing apparatus.
Provided is a plasma measuring method f... |
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Invention
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Substrate treatment method, substrate treatment system, and protective film. Provided are a subst... |
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Invention
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Substrate processing apparatus and substrate placing method.
A substrate processing apparatus is... |
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Invention
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Computer program, information processing method, and information processing device. Provided are ... |
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Invention
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Substrate-processing method. Provided is a substrate-processing method for forming an air gap in ... |
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Invention
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Etching method and plasma treatment device. The disclosed etching method comprises: (a) a step fo... |
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P/S
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Downloadable computer software for controlling semiconductor manufacturing processes; downloadabl... |
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P/S
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Downloadable computer software for controlling semiconductor
manufacturing processes; downloadab... |
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Invention
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Film formation method and film formation device. This film formation method comprises: providing ... |
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Invention
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Polishing device and method for polishing substrate. This polishing device comprises: a treatment... |
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Invention
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Substrate treatment device and substrate treatment method. A substrate treatment device according... |
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Invention
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System and method for measuring film thickness. This system for measuring film thickness comprise... |
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Invention
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Substrate processing system and carriage. This substrate processing system includes: a vacuum con... |
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Invention
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Anomaly detection method and plasma processing device. Disclosed is an anomaly detection method c... |
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Invention
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Plasma treatment device. Provided is a technology with which in-plane uniformity of a substrate c... |
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Invention
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Substrate processing apparatus and method of estimating flow rate of processing liquid for substr... |
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Invention
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Plasma treatment device, power supply system, and etching method. Provided is technology for impr... |
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Invention
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Plasma treatment device and method for producing dielectric window. The present invention provide... |
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Invention
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Etching method and plasma processing apparatus. 3637263244 gas. |
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Invention
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Etching method and plasma processing apparatus. Provided is a technology that suppresses the bloc... |
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Invention
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Methods for retaining a processing liquid on a surface of a semiconductor substrate. Improved pud... |
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2023
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P/S
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Semiconductor manufacturing machines; component parts and fittings for semiconductor manufacturin... |
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P/S
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Machines and instruments used for measuring and testing semiconductor manufacturing machines, nam... |
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P/S
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Machines and instruments used for measuring and testing
semiconductor manufacturing machines; co... |
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Invention
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Methods for retaining a processing liquid on a surface of a semiconductor substrate.
Improved pu... |
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2022
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P/S
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Semiconductor manufacturing machines and their component parts and fittings |
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P/S
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Semiconductor manufacturing machines and their component
parts and fittings. |
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Invention
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Substrate processing method, substrate processing apparatus and substrate processing system.
A s... |
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Invention
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Film forming method and film forming apparatus.
A film forming method selectively performs film ... |
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Invention
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Photoresist composition, method for forming resist pattern, method for manufacturing semiconducto... |
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Invention
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Substrate processing method, substrate processing system and computer-readable recording medium. ... |
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Invention
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Substrate processing method and substrate processing apparatus.
A substrate processing method in... |
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2021
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P/S
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Semiconductor manufacturing machines and their component parts and fittings; machines for mainten... |
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P/S
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Semiconductor manufacturing machines and their component
parts and fittings; machines for mainte... |
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2020
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P/S
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Semiconductor manufacturing machines and their structural parts; flat panel display manufacturing... |
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P/S
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Semiconductor manufacturing machines |
