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2024
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P/S
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Downloadable computer software for controlling semiconductor manufacturing processes; downloadabl... |
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P/S
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Downloadable computer software for controlling semiconductor
manufacturing processes; downloadab... |
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P/S
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Semiconductor manufacturing machines and their component parts and fittings; flat panel display m... |
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P/S
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Semiconductor manufacturing machines and their component
parts and fittings; flat panel display ... |
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2023
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Invention
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Consumable member, plasma processing apparatus, and method of manufacturing consumable member.
A... |
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Invention
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Substrate processing method and substrate processing apparatus.
In one exemplary embodiment, a s... |
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Invention
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Plasma processing apparatus and plasma processing method.
In a plasma processing apparatus, a ra... |
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Invention
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Plasma processing method and plasma processing apparatus.
A plasma processing method includes pr... |
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Invention
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Plasma processing apparatus and cleaning method.
The chamber is internally provided with a stage... |
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Invention
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Substrate processing apparatus and substrate processing method.
A substrate processing apparatus... |
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Invention
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Substrate processing apparatus and shutter.
A substrate processing apparatus comprises a substra... |
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Invention
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Method for fabricating a ferroelectric device.
A method for fabricating a ferroelectric device i... |
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P/S
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Semiconductor manufacturing machines; component parts and fittings for semiconductor manufacturin... |
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Invention
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Vaporization device, semiconductor manufacturing system, and method for vaporizing solid raw mate... |
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Invention
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Information processing method, computer program, and information processing device. Provided are ... |
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Invention
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Substrate processing apparatus and substrate gripping device.
A substrate processing apparatus t... |
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Invention
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Substrate processing apparatus.
A substrate processing apparatus includes: a loading/unloading p... |
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Invention
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Film forming method and film forming apparatus.
A film forming method includes preparing a subst... |
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Invention
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Substrate processing device and electrostatic chuck. This substrate processing device comprises a... |
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Invention
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Substrate transfer unit and substrate transfer control method.
A substrate transfer unit that tr... |
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Invention
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Motor control method, transfer device, and storing medium.
A motor control method for transferri... |
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Invention
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Method of controlling substrate transfer system.
Provided is a method of controlling a substrate... |
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Invention
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Film forming method and film forming apparatus.
A film forming method includes causing adsorptio... |
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Invention
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Placing table and substrate processing apparatus.
There is a placing table comprising: an electr... |
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Invention
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Film forming apparatus and film forming method.
A film forming apparatus for performing film for... |
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Invention
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Shifted multi-via connection for hybrid bonding.
Shifted multi-via connections are disclosed. A ... |
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Invention
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Substrate processing system, and conveyance method. This substrate processing system includes a p... |
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Invention
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Plasma treatment device, power supply system, and frequency control method. The disclosed plasma ... |
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Invention
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Substrate processing apparatus.
A substrate processing apparatus includes a chamber comprising a... |
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Invention
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Substrate processing system and substrate abnormality detection method. This substrate processing... |
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Invention
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Surface observation method. This surface observation method comprises a step a) and a step b). In... |
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Invention
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Bonding device, bonding system, and bonding method. Provided is a bonding device for bonding a fi... |
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Invention
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Substrate treatment method, substrate treatment apparatus, and computer storage medium.
A substr... |
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Invention
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Bonding device, bonding system, and bonding method. A bonding method for bonding substrates toget... |
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Invention
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Substrate processing method and substrate processing device. This substrate processing method inc... |
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Invention
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Method for forming resist pattern, method for producing semiconductor device, substrate processin... |
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Invention
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Plasma treatment device and plasma treatment method. [Problem] To adjust energy of only ions of a... |
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Invention
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Substrate treatment system and edge ring attachment method. Provided is a substrate treatment sys... |
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Invention
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System and method for plasma process uniformity control. A method of plasma processing includes d... |
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P/S
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Machines and instruments used for measuring and testing semiconductor manufacturing machines; com... |
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P/S
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Machines and instruments used for measuring and testing
semiconductor manufacturing machines; co... |
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Invention
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Surface energy modification in hybrid bonding.
A semiconductor structure includes a semiconducto... |
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2022
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P/S
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Semiconductor manufacturing machines and their component parts and fittings |
|
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Invention
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Method to selectively etch silicon nitride to silicon oxide using water crystallization.
Embodim... |
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Invention
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Selective gas phase etch of silicon germanium alloys.
Methods for selective etching of one layer... |
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Invention
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High performance 3d channels with upsilon nanosheets.
A method for fabricating and a structure c... |
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Invention
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Substrate processing apparatus and control method for a substrate processing apparatus.
A substr... |
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Invention
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3d nanosheet stack with dual selective channel removal of high mobility channels.
A transistor s... |
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Invention
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Semiconductor devices and methods of manufacturing thereof.
A method includes forming a fin stru... |
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Invention
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System and method for plasma process uniformity control.
A method of plasma processing includes ... |
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P/S
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Semiconductor manufacturing machines and their component
parts and fittings. |
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Invention
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Component replacement method, component replacement device, and component replacement system.
Th... |
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Invention
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Test device and temperature control method.
A test device according to one aspect of the present... |
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Invention
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Method for setting up test apparatus and test apparatus.
One aspect of the present disclosure re... |
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Invention
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Substrate processing apparatus and substrate processing method.
A substrate processing method in... |
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Invention
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Substrate processing method and substrate processing apparatus.
A substrate processing method of... |
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Invention
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Plasma processing device, high-frequency power supply circuit, and impedance matching method.
Th... |
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Invention
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Apparatus for transferring substrate, substrate processing system and method of processing substr... |
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2021
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P/S
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Semiconductor manufacturing machines and their component parts and fittings; machines for mainten... |
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P/S
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Semiconductor manufacturing machines and their component
parts and fittings; machines for mainte... |
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2020
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P/S
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Semiconductor manufacturing machines and their structural parts; flat panel display manufacturing... |
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P/S
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Semiconductor manufacturing machines |
