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2024
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P/S
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Inspection tool using an electron beam for inspection of semiconductor materials, devices and pro... |
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P/S
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Inspection tool using an electron beam for inspection of
semiconductor materials, devices and pr... |
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Invention
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Aligning a distorted image.
Disclosed herein is a non-transitory computer readable medium that h... |
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Invention
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Charged particle assessment system and method.
The embodiments of the present disclosure provide... |
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Invention
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Pellicle for euv lithography.
A wafer including a mask on one face and at least one layer on an ... |
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Invention
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Metal-silicide-nitridation for stress reduction.
A pellicle for a lithographic apparatus, the pe... |
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Invention
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Method and system to stabilize a frequency sum generated laser. The disclosure provides a method ... |
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Invention
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Multi-layer metrology systems and methods. Multi-layer metrology systems and methods are describe... |
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Invention
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Method of manufacturing an electrostatic object clamp, electrostatic object clamp and semiconduct... |
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Invention
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Improved gas laser. There is described a gas-based laser comprising a heat exchanger for cooling ... |
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Invention
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Method of determining stressors applied to a substrate. Disclosed is a method of determining the ... |
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Invention
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Lithographic apparatus, method of increasing plasma concentration, and method of manufacturing de... |
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Invention
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Broad spectrum metrology systems and methods for various metrology mark types. Broad spectrum met... |
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Invention
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System and method for position control. The present disclosure provides a method of controlling a... |
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Invention
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Fluid handling structure. Disclosed herein is a fluid handling structure for an immersion lithogr... |
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Invention
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Substrate holder, substrate support, lithographic apparatus and method. A substrate holder config... |
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Invention
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System for supporting a pellicle in a lithographic apparatus, allowing for pressure increase in a... |
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Invention
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Membrane for euv lithography. A membrane configured to transmit extreme ultraviolet radiation com... |
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Invention
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Target material storage and delivery system for an euv radiation source. Disclosed is an apparatu... |
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Invention
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Lithographic apparatus, inspection system, and method of implementing parallel sensor-heads with ... |
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Invention
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Enabling more marks in alignment sensor. A substrate alignment apparatus is described. An illumin... |
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Invention
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Method and system for selecting patterns based on similarity metric. Described herein are methods... |
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Invention
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Fluid handling system and method in which defects due to liquid left on a substrate can be reduce... |
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Invention
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Charged particle-optical element, charged particle-optical module, assessment apparatus, chip ass... |
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Invention
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Metrology method and associated metrology tool. Disclosed is a metrology method and metrology too... |
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Invention
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Interferometer system, wavefront analysis system, projection system, lithographic apparatus and m... |
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Invention
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Decoupling system for an optical component. A decoupling system for an optical component is descr... |
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Invention
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Patterning device loading method. A lithographic apparatus and method are provided, the method be... |
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Invention
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Method and system for identifying a center of a pattern using automatic thresholding. Described h... |
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Invention
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Method and system for predicting process information from image data. A method for predicting pro... |
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Invention
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Metrology method and associated metrology device. Disclosed is a cantilever probe arrangement for... |
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Invention
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Metrology method and associated metrology device. Disclosed is a substrate comprising at least on... |
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Invention
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Reticle frontside potential control with clamp burl connection. An electrostatic reticle clamp in... |
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Invention
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Gas supply module, fluid handling system, lithographic apparatus and device manufacturing method.... |
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Invention
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Phase generated carrier interrogator and associated phase generated carrier interrogation method.... |
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Invention
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Method for determining an optical property. A method for determining an optical property of a pro... |
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2023
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P/S
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Machines for micro lithography and machines for use in the manufacture, fabrication and treatment... |
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P/S
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Machines for micro lithography and machines for use in the
fields of integrated circuits, semico... |
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P/S
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Registered software, namely, recorded software for the storage, processing and generation of data... |
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P/S
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Software, especially software for the storage, processing
and generation of data and graphics. |
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2022
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P/S
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Software, especially software for the storage, processing and generation of data and graphics. |
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P/S
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Micro-lithography apparatus and instruments for use in the electronics, micro-lithography, semi-c... |
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Invention
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Improved broadband radiation generation in photonic crystal or highly non-linear fibres.
Radiati... |
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Invention
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Optical element for use in metrology systems.
An optical element, and a metrology tool or system... |
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Invention
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Charged particle detector.
A detector for use in a charged particle device for an assessment app... |
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Invention
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Charged particle detector assembly.
A detector assembly for use in a charged particle device for... |
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Invention
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Deformable mirror system.
A deformable mirror system (300, 400, 500), comprising a monolithic su... |
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Invention
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Holding device for holding a structural part and method for manufacturing the holding device.
A ... |
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Invention
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Systems, methods, and devices for thermal conditioning of reticles in lithographic apparatuses.
... |
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Invention
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Determining localized image prediction errors to improve a machine learning model in predicting a... |
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Invention
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Computer implemented method for diagnosing a system comprising a plurality of modules.
A compute... |
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Invention
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Apparatus and method for producing droplets of target material in an euv source.
Apparatus for a... |
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Invention
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Cooling hood for reticle.
Systems, apparatuses, and methods are provided for removing heat from ... |
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Invention
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Determining rounded contours for lithography related patterns.
A methods and systems for determi... |
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Invention
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Inspection system for reticle particle detection using a structural illumination with aperture ap... |
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Invention
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Metrology method and associated metrology tool.
A method of measuring an overlay or focus parame... |
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Invention
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Method and arrangement for determining thermally-induced deformations.
A method for determining ... |
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Invention
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Lithographic apparatus, temperature sensor, and fiber bragg grating sensor.
A lithographic appar... |
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2021
|
P/S
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Recorded software, in particular software for the storage, processing, and generation of data and... |
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2020
|
P/S
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Maintenance and repair services in connection with machines for use in microlithography and in th... |
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P/S
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Maintenance and repair services in connection with machines for use in the electronics, micro-lit... |
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P/S
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Maintenance and repair services in connection with machines
for use in the electronics, micro-li... |
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2018
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P/S
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Computer hardware and software for the design and manufacture of semiconductor wafers and masks; ... |
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P/S
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Computer hardware and software for the design and
manufacture of semiconductor wafers and masks;... |
|
2017
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P/S
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Semiconductor lithographic machines, namely, lithographic machines used to manufacture semiconduc... |
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P/S
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Computer hardware for improving lithography manufacturing
processes; computer software for impro... |
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P/S
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Computer hardware for improving lithography manufacturing processes; computer software for improv... |
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P/S
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Grinding, cutting, polishing and coating of glass and other optical surfaces Micro-lithography ma... |
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2016
|
P/S
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Micro-lithography equipment; machines for use in the manufacture by micro-lithography, especially... |
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2015
|
P/S
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Exposure units being optical instruments and their parts, for use in lithographic machines, namel... |
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P/S
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Exposure units [optical instruments] and their parts, for
use in lithographic machines. |
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P/S
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Machine tool for mounting, demounting and remounting a
pellicle to a reticle in lithographic equ... |
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P/S
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Electronic inspection devices, data processors, computer hardware and software for defect inspect... |
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P/S
|
[ Electronic inspection devices and ] computer software for inspection of semiconductor materials... |
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|
P/S
|
Inspection tool using particle beam for inspection of semiconductor materials, devices and products |
|
2014
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P/S
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Process control equipment for semiconductor wafer production, namely particle beam emitter in the... |
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P/S
|
Optical measuring apparatus and instruments for measuring test wafers for the manufacture of elec... |
|
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P/S
|
Optical measuring apparatus and instruments for measuring
test wafers for the manufacture of ele... |
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2013
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P/S
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Machinery maintenance and repair in the field of semiconductor industry; installation of semicond... |
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P/S
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Electronic imaging platforms in the field of inspection of semiconductor materials, namely, semic... |
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P/S
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Technology supervision and inspection in the field of quality control of semiconductor wafers and... |
|
2012
|
P/S
|
testing and inspection in the field of quality control of semiconductor wafers and reticles |
|
|
P/S
|
Micro-lithography machines, namely, machines for manufacturing electronic components, integrated ... |
|
|
P/S
|
Micro-lithography machines; machines for use in the
electronics, integrated circuit, semi-conduc... |
|
|
P/S
|
[ Cutting, polishing and heat treatment and coating of glass and other optical surfaces, namely, ... |
|
2011
|
P/S
|
Machines for micro-lithography, namely, machines for manufacturing semiconductors; machines not i... |
