An optical waveguide device in which an optical loss is reduced by removing an air bubble inside an adhesive layer for joining a reinforcing member from near an optical waveguide or the like even in a case where a protruding part such as a rib type optical waveguide or a spot size converter is formed on an optical waveguide substrate is provided. An optical waveguide device includes an optical waveguide substrate (1, 2) provided with an optical waveguide (10, 12), and a reinforcing member (3) disposed on an upper side of the optical waveguide (10, 12) near an end portion of the optical waveguide (10, 12), the optical waveguide substrate (1, 2) and the reinforcing member (3) being joined through an adhesive layer (4), in which a protective layer (13) that covers the optical waveguide (10, 12) is provided on the optical waveguide (10, 12) positioned on a lower side of the reinforcing member (3), and the adhesive layer (4) is disposed outside the protective layer (13).
An electrostatic chuck device comprising: a plate-shaped electrostatic chuck part which has an electrostatic adsorption electrode provided therein and has a mounting surface on which a plate-shaped sample is mounted; and a base part which supports the electrostatic chuck part on a support surface thereof from an opposite side of the mounting surface, wherein the base part has a disk shape which has a central axis at a center thereof, and a coolant channel extending along the support surface is provided inside the base part, wherein the coolant channel includes an outer peripheral channel which overlaps an outer edge of the plate-shaped sample when viewed from an axial direction of the central axis, and an inner peripheral channel which is disposed on an inner side in a radical direction than the outer peripheral channel, wherein at least a portion of the inner peripheral channel extends spirally around the central axis, and a channel cross-sectional area of the inner peripheral channel decreases as a distance from the central axis increases.
Provided is an optical waveguide element including spot size conversion means with suppressed optical insertion loss without complicating a manufacturing process. An optical waveguide element includes an optical waveguide substrate (4) having a rib-type optical waveguide (10) formed of a material having an electro-optic effect, and spot size conversion means for changing a mode field diameter of a light wave propagating through the optical waveguide at a position where an input end or an output end of the rib-type optical waveguide (10) is formed, in which the spot size conversion means includes a first configuration layer (1) that is connected to the rib-type optical waveguide (10) and includes a tapered portion (11) in which a width of the optical waveguide expands, a second configuration layer (2) that is laminated on the first configuration layer (1) and has a width narrower than a width of the first configuration layer (1), and a third configuration layer (3) that is disposed to cover the second configuration layer (2) excluding a part of the second configuration layer (2) close to the rib-type optical waveguide and has a width wider than the width of the second configuration layer (2).
An optical modulator that can suppress crosstalk of a modulation signal even in a case where a wiring substrate is disposed to overlap with a modulation substrate is provided. An optical modulator includes a modulation substrate 1 that includes an optical waveguide and a modulation electrode 10 for modulating a light wave which propagates through the optical waveguide, and a wiring substrate 2 provided with wiring 22 for relaying a modulation signal to be applied to the modulation electrode 10, in which the wiring substrate is disposed to overlap with the modulation substrate to cover an action portion on which modulation is performed by the modulation electrode, and an electromagnetic wave absorption member SH is disposed at at least a part of a position facing the action portion in the wiring substrate.
G02F 1/225 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
G02F 1/21 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
5.
DISPERSION LIQUID, COMPOSITION, SEALING MEMBER, LIGHT-EMITTING DEVICE, ILLUMINATION TOOL, DISPLAY DEVICE, METHOD FOR PRODUCING DISPERSION SOLUTION, AND METHOD FOR MODIFYING SURFACES OF METAL OXIDE PARTICLES
A dispersion liquid according to the present invention contains metal oxide particles which have been surface-modified by at least one kind of silane compound and a solvent, the silane compound contains a methyl group or a methyl group and a hydrocarbon group having 2 or more carbon atoms, in a case where a transmission spectrum of the metal oxide particles that are obtained by drying the dispersion liquid by vacuum drying is measured within a wavenumber range of 800 cm−1 to 3,800 cm−1 with a Fourier transform infrared spectrophotometer, and values of the transmission spectrum are standardized such that a maximum value of the transmission spectrum in the range is 100 and a minimum value is 0, the following expression (1) is satisfied.
A dispersion liquid according to the present invention contains metal oxide particles which have been surface-modified by at least one kind of silane compound and a solvent, the silane compound contains a methyl group or a methyl group and a hydrocarbon group having 2 or more carbon atoms, in a case where a transmission spectrum of the metal oxide particles that are obtained by drying the dispersion liquid by vacuum drying is measured within a wavenumber range of 800 cm−1 to 3,800 cm−1 with a Fourier transform infrared spectrophotometer, and values of the transmission spectrum are standardized such that a maximum value of the transmission spectrum in the range is 100 and a minimum value is 0, the following expression (1) is satisfied.
IA/IB≤3.5 (1)
C08K 9/08 - Ingredients agglomerated by treatment with a binding agent
H01L 33/56 - Materials, e.g. epoxy or silicone resin
C08J 3/07 - Making solutions, dispersions, lattices or gels by other methods than by solution, emulsion or suspension polymerisation techniques in aqueous media from polymer solutions
6.
DISPERSION LIQUID, COMPOSITION, SEALING MEMBER, LIGHT-EMITTING DEVICE, ILLUMINATION TOOL, DISPLAY DEVICE, METHOD FOR PRODUCING DISPERSION SOLUTION, AND METHOD FOR MODIFYING SURFACES OF METAL OXIDE PARTICLES
In a dispersion liquid according to the present invention, regarding metal oxide particles that are obtained by vacuum-drying a dispersion liquid containing metal oxide particles which have been surface-modified by a methyl group and a phenyl group in a predetermined ratio, in a case where a transmission spectrum in a wavenumber range of 800 cm−1 or higher and 3,800 cm−1 or lower is measured by FT-IR, and values of the transmission spectrum are standardized, IA/IB≤3.5 is satisfied (IA represents a spectrum value standardized at 3,500 cm−1, and IB represents a spectrum value standardized at 1,100 cm−1).
National Institute of Information and Communications Technology (Japan)
Inventor
Takano, Shingo
Kataoka, Yu
Oikawa, Satoshi
Ichikawa, Junichiro
Yamaguchi, Yuya
Kanno, Atsushi
Yamamoto, Naokatsu
Kawanishi, Tetsuya
Abstract
An optical waveguide element includes a substrate, an optical waveguide disposed inside the substrate or on the substrate, and an electrode provided along the optical waveguide, working on the optical waveguide to generate a phase change in a light wave propagating through the optical waveguide. The electrode is a traveling-wave electrode. In a modulation section where the light wave is controlled by the electrode, the electrode and the optical waveguide are configured so that the phase change generated in a first modulation section located within a predetermined distance range from a downstream side end portion along a propagation direction of a traveling wave of an electrical signal propagating through the electrode has a sign opposite to a sign of the phase change generated in a second modulation section located within a predetermined distance range from an input end of the electrical signal on an upstream side along the propagation direction.
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
G02F 1/01 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
8.
CERAMIC JOINED BODY, ELECTROSTATIC CHUCKING DEVICE, AND METHOD FOR PRODUCING CERAMIC JOINED BODY
A ceramic joined body includes: a pair of ceramic plates; and an electrode layer that is interposed between the pair of ceramic plates, in which the electrode layer is embedded in at least one of the pair of ceramic plates, and in an outer edge of the electrode layer, a joint surface between the at least one of the pair of ceramic plates and the electrode layer has an inclination with respect to a thickness direction of the pair of ceramic plates and the electrode layer.
H01L 21/683 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping
An optical modulator that suppresses poor welding between a case main body and a lid portion is provided. There is provided an optical modulator including: a case that is a rectangular parallelepiped and accommodates at least an optical waveguide element, in which the case includes a case main body 1 in which one surface of the rectangular parallelepiped forms an opening portion, and a lid portion 2 that has a rectangular shape and that closes the opening portion, the lid portion includes a peripheral part that has a thin thickness, and a protruding part 20 that is formed on the lid portion excluding the peripheral part and that protrudes toward an inside of the case, and when the lid portion is fitted into the case main body, a distance between an inner peripheral side of an end surface forming the opening portion of the case main body and an outer edge of the protruding part is set such that a distance d1 formed on a short-side side of the lid portion is larger than a distance d2 formed on a long-side side of the lid portion.
G02F 1/01 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
The optical absorption loss of the optical waveguide and the signal propagation loss of the high-frequency signal electrode are both reduced at a plurality of intersections between the convex optical waveguide and the high-frequency signal electrode, thereby achieving good operating characteristics. An optical waveguide device includes a substrate on which optical waveguides are formed, and an electrode that is formed on the substrate and has intersections crossing over the optical waveguides, in which the optical waveguides are configured by protruding portions extending on the substrate, and an intermediate layer made of a resin is provided at the adjacent intersections along the electrode to fill spaces between the protruding portions along the electrode and covers top of the protruding portions.
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
11.
DISPERSION LIQUID, COMPOSITION, SEALING MEMBER, LIGHT-EMITTING DEVICE, LLUMINATION TOOL, DISPLAY DEVICE, METHOD FOR PRODUCING DISPERSION SOLUTION, AND METHOD FOR MODIFYING SURFACES OF METAL OXIDE PARTICLES
In a dispersion liquid according to the present invention, regarding metal oxide particles that are obtained by vacuum-drying a dispersion liquid containing the metal oxide particles which have been surface-modified by at least one kind of a silane compound containing a methyl group and a hydrocarbon group having 2 or more carbon atoms and at least one kind of silicone compound, in a case where a transmission spectrum in a wavenumber range of 800 cm-1 or higher and 3,800 cm-1 or lower is measured by FT-IR, and values of the transmission spectrum are standardized, the following expression (1) is satisfied.
In a dispersion liquid according to the present invention, regarding metal oxide particles that are obtained by vacuum-drying a dispersion liquid containing the metal oxide particles which have been surface-modified by at least one kind of a silane compound containing a methyl group and a hydrocarbon group having 2 or more carbon atoms and at least one kind of silicone compound, in a case where a transmission spectrum in a wavenumber range of 800 cm-1 or higher and 3,800 cm-1 or lower is measured by FT-IR, and values of the transmission spectrum are standardized, the following expression (1) is satisfied.
IA/IB ≤ 3.5 (1)
In a dispersion liquid according to the present invention, regarding metal oxide particles that are obtained by vacuum-drying a dispersion liquid containing the metal oxide particles which have been surface-modified by at least one kind of a silane compound containing a methyl group and a hydrocarbon group having 2 or more carbon atoms and at least one kind of silicone compound, in a case where a transmission spectrum in a wavenumber range of 800 cm-1 or higher and 3,800 cm-1 or lower is measured by FT-IR, and values of the transmission spectrum are standardized, the following expression (1) is satisfied.
IA/IB ≤ 3.5 (1)
(“IA” represents a spectrum value standardized at 3,500 cm-1, and “IB” represents a spectrum value standardized at 1,100 cm-1).
C08K 9/08 - Ingredients agglomerated by treatment with a binding agent
C08J 3/07 - Making solutions, dispersions, lattices or gels by other methods than by solution, emulsion or suspension polymerisation techniques in aqueous media from polymer solutions
An optical waveguide element includes: a substrate on which an optical waveguide is formed; and an electrode that is formed on the substrate and controls a light wave propagating through the optical waveguide. The optical waveguide includes a protruding portion extending on the substrate, and the electrode includes a base layer made of Nb, and an upper layer formed on the base layer, the base layer being formed between the substrate and the upper layer. The occurrence of loss in propagating light is effectively suppressed due to the existence of the electrode that controls the propagating light in the optical waveguide element using the protruding optical waveguide
G02F 1/225 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
G02F 1/21 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
An optical waveguide device that can prevent fluctuations in electrical characteristics due to adhesion of foreign matter to electrodes without adversely affecting the degree of freedom in electrode design. The optical waveguide device includes a substrate, an optical waveguide formed on the substrate, an electrode for controlling a light wave propagating through the optical waveguide, and a first insulating layer disposed between two adjacent electrodes among the electrodes, in which the first insulating layer has a height from a surface of the substrate that is higher than heights of the two electrodes.
G02F 1/225 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
G02F 1/21 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
14.
OPTICAL MODULATOR AND OPTICAL TRANSMISSION DEVICE USING SAME
An optical modulator with which electrical connection between a signal electrode and signal wiring of a wiring substrate can be reliably made even in a case where a width of the signal electrode in an action portion of an optical control substrate is narrow is provided. An optical modulator includes an optical control substrate (1) that includes an optical waveguide (OW) including at least a branched waveguide which branches one light wave into two light waves, and that includes a control electrode for applying an electrical field to the branched waveguide, and a wiring substrate provided with a wiring which relays an electrical signal to be applied to the control electrode or with a wiring which terminates the electrical signal, in which the control electrode is provided with a signal electrode (S), the wiring is provided with signal wiring, and in a part (Sc) in which electrical connection is made between the signal electrode (S) and the signal wiring, a clearance (W1) in which the branched waveguide (OW) sandwiches the signal electrode is wider than a clearance (W2) in which the branched waveguide sandwiches the signal electrode in an action portion in which the control electrode applies the electrical field to the branched waveguide.
G02F 1/01 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
A method for repairing an electrostatic chuck device that is formed by bonding an electrostatic chuck member made of ceramics and a temperature-controlling base member made of metal with a first adhesive layer sandwiched therebetween is provided. The method includes a step of repairing the first adhesive layer that has been eroded by using a cold-curing adhesive.
B32B 37/12 - Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by using adhesives
B32B 7/12 - Interconnection of layers using interposed adhesives or interposed materials with bonding properties
B32B 9/04 - Layered products essentially comprising a particular substance not covered by groups comprising such substance as the main or only constituent of a layer, next to another layer of a specific substance
H01L 21/683 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping
16.
OPTICAL MODULATOR AND OPTICAL TRANSMISSION DEVICE USING SAME
It is possible to provide an optical modulator in which a transmission loss from a driver circuit element to a modulation substrate is reduced. An optical modulator includes a modulation substrate (1) that includes an optical waveguide (200) and a modulation electrode (10) for modulating a light wave propagating through the optical waveguide, a driver circuit element (2) that generates a modulation signal to be applied to the modulation electrode (10), and a case (3) that accommodates the modulation substrate (1) and the driver circuit element (2), in which an output terminal (20′) that outputs the modulation signal is provided on an upper surface side of the driver circuit element (2), and a wiring substrate (4) including a wiring that electrically connects the output terminal (20′) and the modulation electrode (10) is disposed above the driver circuit element (2) and the modulation substrate (1) to straddle both the driver circuit element (2) and the modulation substrate (1).
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
G02F 1/21 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
G02F 1/225 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
17.
OPTICAL WAVEGUIDE ELEMENT, AND OPTICAL MODULATION DEVICE AND OPTICAL TRANSMISSION APPARATUS USING SAME
An optical waveguide element that suppresses insertion loss related to coupling to an optical fiber or the like while miniaturizing the optical waveguide element is provided. There is provided an optical waveguide element including: a rib optical waveguide (10) that is made of a material (1) having an electro-optic effect; and the reinforcing substrate (2) that supports the optical waveguide, in which one end of the optical waveguide forms a tapered portion (11) of which a width narrows toward an end surface of the reinforcing substrate, a structure (3) made of a material having a higher refractive index than a material constituting the reinforcing substrate is provided so as to cover the tapered portion, and a coating layer (4) made of a material having a lower refractive index than the material constituting the structure is disposed so as to cover the structure.
G02B 6/42 - Coupling light guides with opto-electronic elements
G02F 1/01 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
18.
OPTICAL DEVICE AND OPTICAL TRANSMISSION APPARATUS USING SAME
An optical device includes a housing that accommodates at least an optical waveguide element, a main body portion 1 of the housing having an opening portion OP on one surface and a lead pin PN1 fixed to a side surface adjacent to the one surface, and including a metal member 2 disposed to surround the opening portion OP and a lid member 11 that closes the opening portion OP and is joined to the metal member 2, in which end portions of the metal member 2 and the lid member 11 along the side surface of the main body portion 1 at which the lead pin PN1 is disposed are located on an inner side of the main body portion 1 than the side surface of the main body portion 1.
To provide an optical waveguide device that is small, has low optical loss, and has long-term stability. Provided is an optical waveguide device in which an optical waveguide A (20) is formed on a first substrate (2), an end portion of the first substrate has an input portion that inputs a light wave into the optical waveguide A or an output portion that outputs a light wave from the optical waveguide A, an optical waveguide B (10) is formed on a second substrate (1), the second substrate has an optical modulation portion that modulates a light wave propagating through the optical waveguide B, and at least a part of the optical waveguide A (20) has a conversion portion (20) that converts an optical mode field diameter.
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
Provided is an electrostatic chuck device including: an electrostatic chuck plate which has a dielectric substrate having a placement surface on which a wafer is placed and electrodes positioned in the dielectric substrate; a focus ring which is installed on an outer peripheral portion of the electrostatic chuck plate and surrounding the placement surface; and a power connection portion which connects the electrode and a power supply. The electrostatic chuck plate has a first electrode positioned in a region overlapping the placement surface in plan view and a second electrode positioned in a region overlapping the focus ring in plan view. The power connection portion includes a power wire electrically connecting the first electrode and the second electrode via a current regulator.
Surface-modified zinc oxide particles having a silane coupling agent having an alkoxy group on surfaces thereof, in which the surface-modified zinc oxide particles have 5.0 × 10-2 g2/s or more and 1.0 × 102 g2/s or less of a penetration rate coefficient A of cyclopentasiloxane with respect to the surface-modified zinc oxide particles, which is indicated by A in the following formula (1). W2 = A·t (1) (in the formula, W is a penetration weight (unit: g), and t is a time (unit: s).)
In an optical waveguide device using a convex optical waveguide, the absorption loss of guided light at an intersection between an optical waveguide and an electrode is reduced, without deteriorating optical characteristics and reducing long-term reliability. Provided is an optical waveguide device including a substrate on which an optical waveguide is formed, and an electrode having an intersection crossing over the optical waveguide on the substrate, in which the optical waveguide is formed with a protruding portion extending on the substrate, a resin layer is provided between the optical waveguide and the electrode at the intersection, the resin layer is formed to cover an upper surface and a side surface of the protruding portion of the optical waveguide, and in a cross section along a width direction of the optical waveguide, a boundary with the electrode is formed with a curve.
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
G02F 1/21 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
G02B 6/42 - Coupling light guides with opto-electronic elements
A wafer support device includes a dielectric substrate and an RF electrode provided in the dielectric substrate. The RF electrode is divided into a plurality of zone electrodes arranged in a planar direction of the dielectric substrate. The wafer support device has: a short-circuit member interconnecting the plurality of zone electrodes; and a main power supply rod connected to the short-circuit member from a back side of the dielectric substrate.
H01L 21/683 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping
24.
OPTICAL WAVEGUIDE ELEMENT, AND OPTICAL MODULATION DEVICE AND OPTICAL TRANSMISSION DEVICE USING SAME
Provided is an optical waveguide device in which both signal electrode collapse and signal electrode peeling/damage can be prevented. An optical waveguide device in which an optical waveguide is formed on a substrate and a control electrode for controlling a light wave propagating through the optical waveguide is disposed on the substrate, is characterized in that, the control electrode includes a signal electrode, and the signal electrode has a narrow portion, where a width of the signal electrode on a substrate side is narrow, and a wide portion, where a width of the signal electrode on an upper portion side of the signal electrode is wide, a prevention film that is disposed in contact with the narrow portion of the signal electrode and that prevents the signal electrode from collapsing, is provided on the substrate, and at a position of the signal electrode where the narrow portion and the wide portion are connected, a surface of the prevention film is formed as a curved surface protruding toward the signal electrode, and a side surface of the signal electrode is formed along the curved surface.
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
25.
SURFACE-MODIFIED ZINC OXIDE PARTICLES, LIQUID DISPERSION, AND COSMETIC
Surface-modified zinc oxide particles which have a silane coupling agent having an alkoxy group on surfaces thereof, in which d50 when measured with a laser diffraction/scattering type particle size distribution-measuring instrument by the following measurement method is 4 μm or less. (Measurement method) 10 g of the surface-modified zinc oxide particles, 88 g of cyclopentasiloxane, and 2 g of polyglyceryl-3 polydimethylsiloxyethyl dimethicone are mixed to obtain a liquid mixture, a dispersion treatment is performed on the obtained liquid mixture at 9,500 rpm for 5 minutes using a homogenizer to obtain a liquid dispersion, the liquid dispersion is diluted with cyclopentasiloxane so that a content of the surface-modified zinc oxide particles in the obtained liquid dispersion is 0.01% by mass to produce a measurement solution, and d50 is measured with the laser diffraction/scattering type particle size distribution-measuring instrument using the obtained measurement solution.
An electrostatic chuck device includes: an electrostatic chuck plate having a dielectric substrate having a placement surface on which a wafer is placed and an adsorption electrode positioned in the dielectric substrate; a metal base supporting the electrostatic chuck plate from a back surface side opposite to the placement surface; and a focus ring installed on an outer peripheral portion of the electrostatic chuck plate and surrounding the placement surface. The electrostatic chuck plate has a ring adsorption region which is adsorbed to the focus ring and is located on a surface positioned on the same side as the placement surface and has a base adsorption region which is adsorbed to the metal base and located on a back surface opposite to the placement surface.
H01L 21/683 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping
An optical modulator includes: an optical waveguide element including an optical waveguide formed on a substrate and a signal electrode for controlling a light wave propagating through the optical waveguide; a drive circuit for outputting two high-frequency signals; and two terminating resistors for respectively terminating outputs of the two high-frequency signals from the drive circuit. The output of one of the high-frequency signals of the drive circuit propagates through the signal electrode of the optical waveguide element and is terminated by a first terminating resistor which is one of the terminating resistors. The output of the other of the high-frequency signals of the drive circuit is terminated by a second terminating resistor which is the other of the terminating resistors. A resistance value of the second terminating resistor is greater than a resistance value of the first terminating resistor.
G02F 1/01 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
G02F 1/225 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
28.
OPTICAL CONTROL ELEMENT, OPTICAL MODULATION DEVICE USING SAME, AND OPTICAL TRANSMISSION APPARATUS
Provided is an optical control element that can minimize an optical path difference between branched waveguides while reducing a difference in structure between the branched waveguides by disposing an input portion and an output portion of an optical waveguide on the same side of a substrate on which the optical waveguide is formed. An optical control element includes a substrate 1 having an electro-optic effect, an optical waveguide 2 formed on the substrate, and a control electrode controlling a light wave propagating through the optical waveguide, in which an input portion (input light L1) and an output portion (output light L2) of the optical waveguide are formed on the same side of the substrate, the optical waveguide includes at least one Mach-Zehnder type optical waveguide portion (MZ) that has two branched waveguides (21, 22) branched from one optical waveguide and combines the two branched waveguides to form one optical waveguide, and the branched waveguides have an even number of turned-back potions (A1, A2).
G02F 1/225 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
G02F 1/21 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
29.
OPTICAL WAVEGUIDE ELEMENT, AND OPTICAL MODULATION DEVICE AND OPTICAL TRANSMISSION DEVICE USING SAME
To provide an optical waveguide device in which damage to a thin plate, particularly damage to an optical waveguide, is prevented. An optical waveguide device includes: a thin plate 1 that has an electro-optic effect and that has a thickness of equal to or thinner than 10 μm, an optical waveguide 2 being formed on the thin plate; and a reinforcing substrate that supports the thin plate, in which the thin plate 1 has a rectangular shape in a plan view, a dissimilar element layer 3, in which an element different from an element constituting the thin plate is disposed in the thin plate, is formed on at least a portion between an outer periphery of the thin plate and the optical waveguide 2, and a total length over which a cleavage plane of the thin plate traverses a region where the dissimilar element layer is formed, is equal to or longer than 5% of a width of the thin plate in a short side direction.
These surface-treated metal oxide particles are metal oxide particles surface-treated with a silane coupling agent having an alkoxy group, in which the metal oxide particles have an ultraviolet shielding property, a weight loss of the surface-treated metal oxide particles on drying at 105° C. for 3 hours is 0.5% by mass or less, a peak derived from the alkoxy group is not detected in a reflection spectrum of the surface-treated metal oxide particles in 900 cm−1 to 1300 cm−1, which is measured by a Fourier transform infrared spectrophotometer, and a value (D98/BET converted diameter) obtained by dividing a dry particle size D98 (μm) thereof by a BET-converted particle diameter (nm) thereof is 0.01 or more and 5.0 or less.
An optical waveguide element includes a substrate having an electro-optic effect, an optical waveguide formed in the substrate, and a control electrode arranged on the substrate to modulate a light wave propagating through the optical waveguide. The control electrode includes a signal electrode and a ground electrode. The signal electrode and the ground electrode are arranged along a modulation effect portion of the optical waveguide that performs modulation. In a shape of a bottom surface of the ground electrode facing the substrate, a slit separating the ground electrode into a first ground electrode close to the signal electrode and a second ground electrode far from the signal electrode is formed in a range corresponding to the modulation effect portion.
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
32.
DISPERSION LIQUID, COMPOSITION, SEALING MEMBER, LIGHT-EMITTING DEVICE, ILLUMINATION TOOL, DISPLAY DEVICE, AND METHOD FOR PRODUCING DISPERSION LIQUID
A dispersion liquid contains a metal oxide particle surface-modified with a silane compound and a silicone compound, when a transmission spectrum of the metal oxide particles that are obtained by vacuum-drying the dispersion liquid is measured in a wavenumber range of 800 cm−1 or more and 3800 cm−1 or less with FT-IR, IA/IB≤3.5 is satisfied (IA is a spectrum value at 3,500 cm−1 and IB is a spectrum value at 1,100 cm−1), and, when the dispersion liquid and methyl phenyl silicone are mixed such that a mass ratio of a total mass of the metal oxide particles and the surface-modifying material to a mass of methyl phenyl silicone becomes 30:70 and the hydrophobic solvent is removed, a viscosity is 9 Pa·s or less.
A ceramic joined body (1) includes: a pair of ceramic plates (2,3) that include a conductive material; a conductive layer (4) and an insulating layer (5) that are interposed between the pair of ceramic plates (2, 3); and a pair of intermediate layers (6, 7) that are interposed between the pair of ceramic plates (2, 3) and the conductive layer (4) and are in contact with the pair of ceramic plates (2, 3) and the conductive layer (4).
H01L 21/683 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping
C04B 37/00 - Joining burned ceramic articles with other burned ceramic articles or other articles by heating
In order to provides an optical waveguide element and an optical modulator that can prevent the damage to the substrate and the deterioration of the properties of the substrate that may occur due to the stress, by reducing the influence of stress on the substrate by the buffer layer, the optical waveguide 1 is provided with a substrate 5 having an electro-optical effect; an optical waveguide 10 formed on the substrate 5; a first buffer layer 9a provided on the substrate 5; and a second buffer layer 9b provided under the substrate 5, wherein the first buffer layer 9a and the second buffer layer 9b are composed of substantially the same material and have substantially the same thickness, and the first buffer layer 9a and the second buffer layer 9b are formed to be in contact with an upper surface and lower surface of the substrate 5, respectively.
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
G02F 1/21 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
G02B 6/13 - Integrated optical circuits characterised by the manufacturing method
35.
CERAMIC JOINED BODY, ELECTROSTATIC CHUCK DEVICE, AND METHOD FOR PRODUCING CERAMIC JOINED BODY
A ceramic joined body (1) includes: a pair of ceramic plates (2,3) that include a conductive material; and a conductive layer (4) and an insulating layer (5) that are interposed between the pair of ceramic plates (2, 3), a porosity at an interface between the pair of ceramic plates (2, 3) and the insulating layer (5) is 4% or less, and a ratio of an average primary particle diameter of an insulating material which forms the insulating layer (5) to an average primary particle diameter of an insulating material which forms the ceramic plates (2, 3) is more than 1.
C04B 37/00 - Joining burned ceramic articles with other burned ceramic articles or other articles by heating
H01L 21/683 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping
C04B 35/565 - Shaped ceramic products characterised by their composition; Ceramic compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxides based on carbides based on silicon carbide
C04B 41/50 - Coating or impregnating with inorganic materials
There is provided an optical waveguide device including a substrate, an optical waveguide formed on the substrate, and a working electrode that controls a light wave propagating through the optical waveguide, in which the working electrode includes a first base layer made of a first material, and a first conductive layer on the first base layer, and a conductor pattern including a second base layer made of a second material different from the first material and a second conductive layer on the second base layer is formed in a region other than a path from an input end to an output end of the optical waveguide, in a region on the substrate.
G02F 1/225 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
G02F 1/21 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
H04B 10/516 - Transmitters - Details of coding or modulation
37.
OPTICAL WAVEGUIDE DEVICE, MANUFACTURING METHOD OF OPTICAL MODULATION ELEMENT, OPTICAL MODULATOR, OPTICAL MODULATION MODULE, AND OPTICAL TRANSMISSION APPARATUS
There is provided an optical waveguide device including: a substrate; an optical waveguide formed on the substrate; and a working electrode that controls a light wave propagating through the optical waveguide, in which the working electrode includes a first base layer made of a first material, a first conductive layer on the first base layer, a second base layer made of a second material different from the first material, which is on the first conductive layer, and a second conductive layer on the second base layer, and an edge of the second base layer is covered with the second conductive layer, in a cross-section perpendicular to an extending direction of the optical waveguide.
G02B 6/12 - Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
G02B 6/136 - Integrated optical circuits characterised by the manufacturing method by etching
G02F 1/21 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
G02F 1/225 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
38.
OPTICAL MODULATOR AND OPTICAL TRANSMISSION DEVICE USING SAME
An optical modulator includes a relay substrate having signal conductor patterns that connect input signal terminals and signal electrodes of an optical modulation element and ground conductor patterns, and a housing that accommodates the optical modulation element and the relay substrate. Regarding at least one signal conductor pattern, the two ground conductor patterns sandwiching the signal conductor pattern are formed in an asymmetrical shape in a plan view in a rectangular connection area including a signal connection portion at which the signal conductor pattern and the input signal terminal are connected. The connection area is centered on the at least one signal conductor pattern in a width direction, and has a width equal to a distance to the nearest adjacent signal conductor pattern and a height equal to a distance from an end of the signal connection portion farthest from a signal input side to the signal input side.
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
G02F 1/03 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect
39.
OPTICAL MODULATOR AND OPTICAL TRANSMISSION APPARATUS USING SAME
An optical modulator includes: an optical modulation element that is configured to generate two modulated light beams, each of which is modulated by two sets of electrical signals, and that includes a plurality of signal electrodes; a plurality of signal input terminals, each of which inputs an electrical signal; a relay substrate on which a plurality of signal conductor patterns and a plurality of ground conductor patterns are formed, the relay substrate being configured to propagate the two sets of electrical signals by two pairs of the adjacent signal conductor patterns; and a housing, in which the at least two signal conductor patterns including at least one parts mounting part including electrical circuit elements are configured such that first signal propagation directions, which are signal propagation directions at the parts mounting parts, are different from each other.
G02F 1/03 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect
G02F 1/01 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
40.
OPTICAL MODULATOR AND OPTICAL TRANSMISSION APPARATUS USING SAME
An optical modulator includes: an optical modulation element including a plurality of signal electrodes and generating two modulated light beams, each of which is modulated by two sets of electrical signals; a plurality of signal input terminals, each of which inputs an electrical signal; a relay substrate on which a plurality of signal and ground conductor patterns are formed, the relay substrate propagating the two sets of electrical signals by two pairs of the adjacent signal conductor patterns; and a housing, in which at least one signal conductor pattern includes at least one component mounting portion including at least a parallel circuit of a resistor and a capacitor, and the relay substrate includes a metal body connected on the ground conductor pattern or a substrate removal portion that sandwiches a portion of the signal conductor pattern downstream of the component mounting portion along a propagation direction of the electrical signal.
G02F 1/01 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
G02F 1/03 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect
An optical waveguide device includes a substrate, an optical waveguide formed on the substrate, two electrodes disposed at positions sandwiching the optical waveguide from both sides in a plane of the substrate; and a dielectric layer covering a top of the optical waveguide, wherein the dielectric layer extends in a width direction of the optical waveguide to an extent including edges of the two electrodes, facing the optical waveguide, and is disposed to partially cover each of the two electrodes.
G02F 1/225 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
G02F 1/21 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
An optical waveguide element includes: a substrate; and a plurality of optical waveguides causing light to turn between a first direction and a second direction that is an opposite direction of the first direction in a plane of the substrate, the plurality of optical waveguides includes first portions extending in the first direction with a predetermined distance therebetween, second portions extending in a third direction that is different from the first direction, and third portions extending in the second direction, and each of the plurality of optical waveguides except for the optical waveguide in which the second portion extending in the third direction is located on an innermost side in the first direction intersects, at the third portion, another optical waveguide in which the second portion extending in the third direction is located further inward in the first direction.
G02F 1/21 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
G02B 6/12 - Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
Provided is an optical waveguide element that prevents leaked light generated at a forking section from entering a downstream optical waveguide such as another forking section, thereby affording minimal degradation of optical characteristics. The optical waveguide is characterized in that: at least one of two fork waveguides (20a, 20b) forking from a first forking section (20) comprises a second forking section (21, 22); slab waveguides (3c-1 to 3c-3) are formed between the two fork waveguides; and between the first forking section and the second forking section, slits (41, 42) are formed that partition the slab waveguides into a first slab waveguide area (3c-1) close to the first forking section and second slab waveguide areas (3c-2, 3c-3) close to the second forking section(s).
An optical modulator includes a relay substrate having signal conductor patterns that connect signal input terminals and signal electrodes of an optical modulation element and ground conductor patterns, and a housing, in which the signal conductor pattern includes a component mounting portion including an electrical circuit element. Two ground conductor patterns sandwiching the signal conductor pattern are formed in an asymmetrical shape in a plan view within a component mounting area having a square shape in the plan view centered on the component mounting portion. A direction of a side of the component mounting area having the square shape is same as the extending direction of the signal conductor pattern and a length of a side of the component mounting area is equal to a distance from a center of the component mounting portion to a portion on an adjacent signal conductor pattern closest to the center.
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
G02F 1/03 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect
G02F 1/21 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
45.
TITANIUM OXIDE POWDER, AND DISPERSION AND COSMETICS USING SAME
A titanium oxide powder of the present invention has a BET specific surface area of 5 m2/g or higher and 15 m2/g or lower and contains single-crystalline titanium oxide particles, in which a value (d10/d50) that is obtained by dividing a value (d10), which is obtained when a particle size distribution represented by a cumulative volume percentage of primary particle diameters of the titanium oxide particles is 10%, by a value (d50), which is obtained when a particle size distribution represented by a cumulative volume percentage thereof is 50%, is 0.3 or higher and 1 or lower, an amount of titanium oxide thereof is 99.0% by mass or more, and the titanium oxide powder has an anatase-type crystalline phase.
Anti-fouling coating film, glass ceramic product, coating material for forming anti-fouling coating film, and method for producing glass ceramic product
An anti-fouling coating film of the present invention includes a component (A): zirconium; a component (B): lanthanum; and a component (C): at least one selected from the group consisting of silicon, phosphorus, and boron, in which in a case where masses of the component (A), the component (B), and the component (C) are used by being converted into masses of oxides thereof, total mass of the component (A) and the component (B) with respect to a mass of the anti-fouling coating film is 90% or more and 95% or less, and in a case where X is defined by X=mass of component (B)/(total mass of component (A)+component (B))×100, X is 20% or more and 50% or less, and the mass of the component (C) to the mass of the anti-fouling coating film is 5% or more and [6+(X−20)/6]% or less.
C04B 35/48 - Shaped ceramic products characterised by their composition; Ceramic compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxides based on zirconium or hafnium oxides or zirconates or hafnates
C03C 10/00 - Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition
C03C 17/25 - Oxides by deposition from the liquid phase
C04B 35/622 - Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
A composite sintered body including: a metal oxide as a main phase; silicon carbide as a sub-phase; and silicate of a metal element that is included in the metal oxide, in which the average aggregation diameter of the silicate in the field of view of 600 μm2 at a magnification of 1000 times is 5 μm or lower.
H01L 21/683 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping
H01L 21/687 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
C04B 35/505 - Shaped ceramic products characterised by their composition; Ceramic compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare earth compounds based on yttrium oxide
C04B 35/565 - Shaped ceramic products characterised by their composition; Ceramic compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxides based on carbides based on silicon carbide
Provided is a method for surface-modifying inorganic particles having a mixing step of mixing at least a surface-modifying material and the inorganic particles to obtain a liquid mixture and a dispersion step of dispersing the inorganic particles in the liquid mixture, in which a content of the inorganic particles in the liquid mixture is 10% by mass or more and 49% by mass or less, and a total content of the surface-modifying material and the inorganic particles in the liquid mixture is 65% by mass or more and 98% by mass or less.
Provided is an optical modulator that can be driven at lower voltage through the use of differential signal output. An optical modulator includes a substrate 1 and optical waveguides (21, 22) and a control electrode that are formed on the substrate, in which the optical waveguide includes Mach-Zehnder type optical waveguide, the control electrode is provided with two ground electrodes sandwiching three signal electrodes; the three signal electrodes are constituted by second and third signal electrodes that sandwich a first signal electrode, and have a wiring structure in which one modulation signal of the differential signal is applied to the first signal electrode, and the other modulation signal of the differential signal is applied to the second and third signal electrodes; and one branched waveguide (21) out of two Mach-Zehnder type optical waveguides is disposed between the first and second signal electrodes, and the other branched waveguide (22) is disposed between the first and third signal electrodes.
G02F 1/225 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
G02F 1/21 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
50.
Optical modulation element and optical modulation module
An optical modulation element that can be housed in the same housing together with an electronic circuit is implemented without deteriorating the high-frequency characteristics and the optical modulation characteristics and without increasing a size of the housing. An optical modulation element includes two Mach-Zehnder type optical waveguides that are provided on a substrate, a branched waveguide that branches input light which is input from an outside of the substrate into two light beams, two connection waveguides that respectively guide the light beams branched by the branched waveguide to the two Mach-Zehnder type optical waveguides, and electrodes that respectively control optical waves propagating in optical waveguides configuring the two Mach-Zehnder type optical waveguides, in which respective parallel waveguides of the two Mach-Zehnder type optical waveguides are configured to extend along one side of the substrate, the branched waveguide is disposed such that light is input from a direction of the one side, and the branched waveguide is formed to be line-symmetrical with respect to a propagation direction of the light input to the branched waveguide and to output the two branched light beams in a direction different from the propagation direction.
G02F 1/225 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
G02F 1/21 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
G02B 6/293 - Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
In order to provide an optical modulator capable of preventing damage to the substrate and preventing deterioration of the properties of the modulator by reducing the stress on the substrate generated by the modulation electrode, there is provided an optical modulator 1, including: a substrate 5 having an electro-optic effect; an optical waveguide 10 formed on the substrate 5; and a modulation electrode (signal electrode S and ground electrode G) provided on the substrate 5 and modulating a light wave propagating in the optical waveguide 10, wherein a resin 8 to reduce the stress on the substrate 5 generated by the modulation electrode is arranged between a part of the bottom surface of the modulation electrode and the substrate 5 facing a part of the bottom surface of the modulation electrode.
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
G02F 1/21 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
G02F 1/225 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
Provided is an optical waveguide element that prevents damage to a substrate and improves productivity. In an optical waveguide element in which an optical waveguide (24, 23) is formed on a substrate 1, a groove portion 3 is formed in at least a part of the substrate along an outer periphery 10 of the substrate 1.
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
G02F 1/21 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
G02F 1/225 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
G02F 1/03 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect
53.
DISPERSION LIQUID, COMPOSITION, SEALING MEMBER, LIGHT-EMITTING DEVICE, ILLUMINATION TOOL, DISPLAY DEVICE, AND METHOD FOR PRODUCING DISPERSION LIQUID
A dispersion liquid according to the present invention is a dispersion liquid containing metal oxide particles which have been surface-modified with a silane compound and a silicone compound, in which, when the dispersion liquid is dried by vacuum drying to separate the metal oxide particles, and a transmission spectrum of the separated metal oxide particles is measured in a wavenumber range from 800 cm−1 to 3800 cm−1 with a Fourier transform infrared spectrophotometer, Formula (1) below: IA/IB≤3.5 is satisfied (in the formula, “IA” represents a spectrum value at 3500 cm−1 and “IB” represents a spectrum value at 1100 cm−1).
In an optical waveguide element, performance deterioration due to recoupling of unnecessary light leaking from an optical waveguide with the optical waveguide is prevented. An optical waveguide element includes an optical substrate on which an optical waveguide is formed, and a support substrate that is bonded to the optical substrate, on a bonded surface of the support substrate bonded to the optical substrate, a recess portion along the optical waveguide on the optical substrate is formed directly under the optical waveguide, a portion of the support substrate from an upper surface of the support substrate to at least a depth of a bottom surface of the recess portion has a refractive index higher than a substrate refractive index of the optical substrate, and the recess portion is filled with a substance having a refractive index lower than the substrate refractive index.
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
G02F 1/21 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
G02F 1/225 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
G02B 6/122 - Basic optical elements, e.g. light-guiding paths
In order to provide an optical waveguide element that is capable of reducing coupling loss at a coupling portion with an optical fiber and of reducing propagation loss in an optical waveguide, the optical waveguide element comprises a supporting substrate and a waveguide layer consisting of a material having an electro-optic effect stacked on the supporting substrate, wherein a rib portion for forming an optical waveguide is provided protruding on an upper surface of the waveguide layer; a groove portion is formed on an upper surface of the supporting substrate directly below a part of the rib portion; and the groove portion is filled with a material having an effective refractive index comparable to that of the waveguide layer.
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
56.
Zinc oxide powder, dispersion, paint, and cosmetic
C09D 17/00 - Pigment pastes, e.g. for mixing in paints
A61K 8/02 - Cosmetics or similar toiletry preparations characterised by special physical form
A61K 8/58 - Cosmetics or similar toiletry preparations characterised by the composition containing organic compounds containing atoms other than carbon, hydrogen, halogen, oxygen, nitrogen, sulfur or phosphorus
To provide an optical modulator in which a plurality of Mach-Zehnder type optical waveguides are integrated, which can be driven at a low voltage, and in which the occurrence of a crosstalk phenomenon is suppressed. Provided is an optical modulator including a substrate 1 having an electro-optic effect, and an optical waveguide 10 and a control electrode that are formed on the substrate, in which the optical waveguide has a structure in which a plurality of Mach-Zehnder type optical waveguides are disposed in parallel, the control electrode has a GSSG type differential electrode structure in which two signal electrodes S are disposed between two ground electrodes G for one of the Mach-Zehnder type optical waveguides, and a crosstalk suppressing unit that suppresses signal crosstalk is provided in the ground electrode sandwiched between adjacent Mach-Zehnder type optical waveguides, so that optical modulator can be driven at a low voltage, and in which the occurrence of a crosstalk phenomenon is suppressed.
G02F 1/21 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
G02F 1/225 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
58.
OPTICAL MODULATOR AND OPTICAL TRANSMISSION DEVICE USING SAME
An optical modulator includes an optical modulation element having a plurality of signal electrodes, a plurality of signal input terminals, a relay substrate on which a plurality of signal conductor patterns that electrically connect the signal input terminals and the signal electrodes and a plurality of ground conductor patterns are formed, and a housing. A signal input side and signal output side of the relay substrate face each other in a plan view, and electromagnetic wave propagation suppressing units that are made of a material that absorbs electromagnetic waves and have a height protruding from a surface of the relay substrate are provided, along at least one side of an end portion of the signal input side and an end portion of the signal output side in the plan view.
G02F 1/225 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
G02F 1/01 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
G02F 1/21 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
59.
Zinc oxide powder, dispersion, paint, and cosmetic
2/g or less, an apparent specific volume measured by a loose packing method of the powder is 1.0 mL/g or more and 7.5 mL/g or less, and a value indicated by (the apparent specific volume measured by the loose packing method/an apparent specific volume measured by a tapping method), which is obtained by dividing the apparent specific volume (mL/g) measured by the loose packing method by the apparent specific volume (mL/g) measured by the tapping method of the powder, is 1.50 or more and 2.50 or less.
An optical waveguide element includes a substrate and an optical waveguide that is disposed on the substrate. The optical waveguide has an effective refractive index change portion in which an effective refractive index of the optical waveguide related to a fundamental mode A parallel to a plane of polarization of a light wave propagated through the optical waveguide changes according to propagation of the light wave. In the effective refractive index change portion, a cross-sectional shape of the optical waveguide which is perpendicular to a propagation direction of the light wave is set such that the effective refractive index of the optical waveguide related to the fundamental mode A is higher than an effective refractive index of the optical waveguide related to another fundamental mode B perpendicular to the fundamental mode A.
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
61.
OPTICAL WAVEGUIDE ELEMENT AND OPTICAL WAVEGUIDE DEVICE
In an optical modulation element using a thinly processed substrate, cracking of the substrate during electrical connection is prevented, and poor connection or a reduction in manufacturing yield is prevented. An optical waveguide element includes an optical substrate on which an optical waveguide and a conductor pattern are formed, and a support substrate that supports the optical substrate, in which the conductor pattern includes at least one electrical connection area defined as a range in which electrical connection is performed, the optical substrate has a substrate removal portion in which a material of the optical substrate has been removed to penetrate through the optical substrate at a portion corresponding to the electrical connection area, and at least a part of the electrical connection area is formed on the support substrate via the substrate removal portion.
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
An optical modulator includes an optical modulation element including an optical waveguide formed on a substrate and a housing that accommodates the optical modulation element, the housing has a bottom surface wall having a quadrilateral shape in a plan view, first and second long side walls that are connected to two opposite edges of the bottom surface wall, and first and second short side walls that are shorter than the first and second long side walls and are connected to two other opposite edges of the bottom surface wall. An average wall thickness of the second long side wall is equal to or larger than an average wall thickness of the first long side wall. At least one of the first and second short side walls has an average thickness that is thinner than the average thickness of the first long side wall.
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
G02F 1/295 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection in an optical waveguide structure
G02B 6/12 - Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
G02F 1/225 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
G02F 1/21 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
63.
Optical waveguide device with reinforcement member for optical fiber and waveguide portion
An optical waveguide device includes a substrate on which an optical waveguide is formed, and an object that is disposed on the substrate. The optical waveguide includes a mode conversion/branching portion that converts a mode of a light wave propagating through the optical waveguide and branches the light wave, and the object is disposed to cover a part or the whole of the mode conversion/branching portion or not to cover the mode conversion/branching portion when the substrate is viewed in a plan view. In a case where the object is disposed to cover a part of the mode conversion/branching portion, the object is disposed not to consecutively cover a section over a length of a predetermined value or higher in an advancing direction of a light wave.
G02F 1/225 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
G02F 1/00 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
G02F 1/313 - Digital deflection devices in an optical waveguide structure
G02F 1/21 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
64.
Electrostatic chuck device and electrostatic chuck device manufacturing method
H01L 21/683 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping
An optical waveguide device including a rib-type optical waveguide 2 formed of a material having an electro-optic effect, and a reinforcing substrate 1 that supports the rib-type optical waveguide, one end of the rib-type optical waveguide 2 has a tapered portion 20, structures 4 are provided that are disposed apart from the tapered portion so as to sandwich the tapered portion and are disposed on the reinforcing substrate 1, an upper substrate is disposed above the tapered portion and the structures, and an adhesive layer is disposed in a space sandwiched between the upper substrate and the structures.
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
66.
Optical waveguide device, and optical modulation device and optical transmission device using same
An optical waveguide device includes a substrate on which an optical waveguide is formed, and a reinforcing block disposed on the substrate, along an end surface of the substrate on which an input portion or an output portion of the optical waveguide is disposed, in which an optical component that is joined to both the end surface of the substrate and an end surface of the reinforcing block is provided, a material used for a joining surface of the optical component and a material used for the substrate or the reinforcing block have at least different linear expansion coefficients of a direction parallel to the joining surface, and an area of a joining portion of the optical component is set to be smaller than an area of the end surfaces including joining portions of the substrate and the reinforcing block.
An optical waveguide device includes: a substrate having an electro-optic effect, an optical waveguide formed on the substrate, a light-receiving element disposed on the substrate and monitoring a light wave propagating through the optical waveguide or a light wave that is radiated from the optical waveguide; and a monitoring optical waveguide extending from the optical waveguide to the light-receiving element, in which the monitoring optical waveguide has a U-turn waveguide with respect to an output direction of the optical waveguide, and the light-receiving element is disposed at a part of the monitoring optical waveguide after the U-turn waveguide.
An optical modulator includes a substrate on which an optical waveguide and a modulation electrode that modulates a light wave propagating through the optical waveguide are formed, and a case housing the substrate, the optical waveguide includes at least an optical branching part that branches one light wave into two light waves or an optical combining part that combines two light waves into one light wave, the modulation electrode has a signal electrode and a ground electrode, and a part of the signal electrode is disposed so as to cross the optical branching part or the optical combining part, and the optical modulator is provided with a suppressing unit that suppresses changes in an intensity ratio of the light waves branched at the optical branching part or an intensity ratio of the light waves combined at the optical combining part, by the signal electrode.
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
G02F 1/21 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
69.
Optical waveguide device, and optical modulation device and optical transmission device using same
An optical waveguide device includes a substrate on which an optical waveguide is formed, and a reinforcing block disposed on the substrate, along an end surface of the substrate on which an input portion or an output portion of the optical waveguide is disposed, in which an optical component that is joined to both the end surface of the substrate and an end surface of the reinforcing block is provided, a material used for a joining surface of the optical component and a material used for the substrate or the reinforcing block have at least different linear expansion coefficients of a direction parallel to the joining surface, and an area of the joining surface is set to be smaller than a maximum value of a total of areas of cross sections of the substrate and the reinforcing block parallel to the joining surface.
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
G02F 1/03 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect
An optical functional device includes a package case accommodating an optical functional element, an input optical fiber, and an output optical fiber. The optical functional device includes a first reflecting surface that reflects input light output from the input optical fiber to an optical path of output light, a second reflecting surface that reflects the input light to the optical functional element, and a third reflecting surface that reflects the output light in a direction in which the output light becomes further away from an optical axis of the input optical fiber. An optical axis of a leaked light beam transmitted through the second reflecting surface after being reflected by the first reflecting surface or an extension line of the optical axis in an optical propagation medium does not include a portion that is aligned with an optical axis of the output light reflected by the third reflecting surface.
G02B 6/30 - Optical coupling means for use between fibre and thin-film device
G02B 6/34 - Optical coupling means utilising prism or grating
G02B 6/42 - Coupling light guides with opto-electronic elements
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
71.
Optical waveguide element, optical waveguide device and optical transmission apparatus
In an optical waveguide element which uses a rib type optical waveguide, light propagating in the rib type optical waveguide is monitored stably and accurately. The optical waveguide element includes a rib type optical waveguide provided on a optical waveguide substrate and configured of a convex portion protruding in a thickness direction of the optical waveguide substrate and extending in a plane direction of the optical waveguide substrate, and a light receiving element configured of a light receiving part formed on a light receiving element substrate disposed on the rib type optical waveguide and configured to receive at least a part of light propagating through the rib type optical waveguide, and the light receiving element substrate is supported by at least one first convex portion having the same height as that of the rib type optical waveguide provided on the optical waveguide substrate.
G02F 1/21 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
G02F 1/225 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
An electrostatic chuck device (1) including: an electrostatic chuck member (2) formed of ceramics; a temperature control base member (3) formed of metal; and a power supply terminal (16) which is inserted in the temperature control base member (3) and applies a voltage to an electrode for electrostatic attraction (13) which is provided on the electrostatic chuck member (2), the electrode for electrostatic attraction (13) and the power supply terminal (16) are connected with each other via a conductive adhesive layer (17), the conductive adhesive layer (17) contains a carbon fiber and a resin, and the carbon fiber has an aspect ratio of 100 or higher.
H01T 23/00 - Apparatus for generating ions to be introduced into non-enclosed gases, e.g. into the atmosphere
B23Q 3/15 - Devices for holding work using magnetic or electric force acting directly on the work
H01L 21/683 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping
An optical waveguide element is provided to effectively reduce an optical absorption loss of waveguide light which may occur at an intersecting part between an optical waveguide and an electrode without causing deterioration in optical characteristics and degradation of long-term reliability of the optical waveguide element. The optical waveguide element includes an optical waveguide formed in a substrate, and an electrode controlling optical waves propagated in the optical waveguide and having an intersecting part intersecting the optical waveguide thereabove. A portion of a resin layer is provided between the optical waveguide and the electrode in a portion of the substrate including the intersecting part. A corner of the resin layer on a side of the electrode is constituted to be a curve in a cross section in an extending direction of the electrode.
G02F 1/03 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
G02F 1/225 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
An optical waveguide device including an optical waveguide substrate that has an electro-optic effect, is a crystal having anisotropy in thermal expansion rate, has a thickness set to 10 μm or lower, and includes an optical waveguide and a holding substrate that holds the optical waveguide substrate, the optical waveguide substrate and the holding substrate being joined to each other, in which the holding substrate is formed of a crystal having a lower dielectric constant than the optical waveguide substrate and having anisotropy in thermal expansion rate, and the optical waveguide substrate and the holding substrate are joined to each other such that differences in thermal expansion rate between the optical waveguide substrate and the holding substrate become small in different axial directions on a joint surface.
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
G02F 1/225 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
An optical waveguide element including a substrate, an optical waveguide formed on the substrate, and an electrode for controlling a light wave propagating through the optical waveguide, in which the optical waveguide and the electrode have an intersection in which the optical waveguide and the electrode intersect with each other, and at the intersection, the electrode has a multilayer structure including a plurality of metal layers made of a metal material, and a resin layer made of a resin material is formed between the electrode and the substrate.
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
G02F 1/225 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
An optical modulator including an optical modulation element including an optical waveguide formed on a substrate, and a housing that accommodates the optical modulation element. The housing has a high-thermal resistance portion within at least a part of an optical input and output region. The optical input and output region is an area ranging from an outer surface of a first short side wall to a first end portion of the optical modulation element, and the high-thermal resistance portion having a higher thermal resistance than a portion of the housing other than the optical input and output region.
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
G02B 6/27 - Optical coupling means with polarisation selective and adjusting means
G02F 1/01 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
G02F 1/313 - Digital deflection devices in an optical waveguide structure
An optical modulator has an optical modulation element including optical waveguides and a housing that accommodates the optical modulation element. The housing has a bottom surface wall having a quadrilateral shape in a plan view, first and second long side walls that are connected to two opposite edges of the bottom surface wall, and first and second short side walls, shorter than the long side walls, and connected to two other opposite edges of the bottom surface wall. The optical modulation element is accommodated in a space surrounded by the bottom surface wall and the side walls. The second long side wall has a wall thickness that is equal to or larger than that of the first long side wall, and at least one of the first and second short side walls has a wall thickness that is thinner than that of the first long side wall.
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
G02F 1/295 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection in an optical waveguide structure
G02F 1/225 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
G02F 1/21 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
78.
Composite sintered body, electrostatic chuck member, electrostatic chuck device, and method for producing composite sintered body
A ceramic composite sintered body, including: a metal oxide as a main phase, and silicon carbide as a sub-phase, in which crystal grains of the silicon carbide are dispersed in crystal grains of the metal oxide and at crystal grain boundaries of the metal oxide, and an average crystal grain size of the silicon carbide dispersed at the crystal grain boundaries of the metal oxide is 0.30 μm or less.
C04B 35/505 - Shaped ceramic products characterised by their composition; Ceramic compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare earth compounds based on yttrium oxide
H01L 21/683 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping
C04B 35/626 - Preparing or treating the powders individually or as batches
Provided is an optical waveguide element capable of connection such as wire bonding, suppressing usage of gold, and suppressing deterioration of a conductor loss. An optical waveguide element includes a substrate 1 having an electro-optic effect, an optical waveguide 2 formed on the substrate, and a control electrode (30, 31) provided on the substrate and controlling a light wave propagating through the optical waveguide. The control electrode is made of a material other than gold, and the gold is disposed on at least a wire bonding portion 4 of the control electrode.
G02F 1/03 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
80.
Electrostatic chuck device and method for producing electrostatic chuck device
An electrostatic chuck device includes: a mounting table provided with amounting surface on which a plate-shaped sample is mounted; an annular focus ring; and a cooling element for cooling the focus ring, in which the mounting table has a holding portion provided to surround the mounting surface, and the holding portion includes an annular groove surrounding the mounting surface, and a through-hole that is open on a bottom surface of the groove, wherein a tubular insulator has been inserted into the through-hole, the holding portion has upper surfaces, which are located on both sides of the groove in a width direction, as holding surfaces that are in contact with the focus ring and hold the focus ring, wherein the holding surface satisfies the following conditions (i) to (iii); (i) surface roughness is 0.05 μm or less, (ii) a flatness is 20 μm or less, and (iii) the holding surface does not have a recess having a depth of 1.0 μm or more and extending in a direction intersecting the holding surface.
H01L 21/683 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
To provide an optical element in which an electrode is directly formed on an LN substrate, and a drift phenomenon is suppressed. In an optical element including: a substrate made of lithium niobate crystals; and an electrode disposed on the substrate, the substrate and the electrode are in direct contact with each other, and as a contact metal disposed on a surface of the electrode where the electrode is in contact with the substrate, a metal material whose standard enthalpy of formation per coordinate bond upon oxidation is greater than a standard enthalpy of formation per coordinate bond of niobium pentoxide is used.
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
An optical modulation device includes: a substrate which extends in one direction; an optical waveguide provided on the substrate in a longitudinal direction of the substrate; a half-wave plate; and a combining element which faces an end portion of the substrate and combines two types of linearly polarized light, which have vibration planes orthogonal to each other, to generate composite light, in which the optical waveguide modulates the linearly polarized light which propagates through an inside of the optical waveguide to generate first polarized light and second polarized light, which are linearly polarized light, the half-wave plate is provided at a position to which the second polarized light enters, the combining element includes a transparent base body, a first optical film provided on a first surface of the transparent base body, and a second optical film provided on a second surface which faces the first surface of the transparent base body, the first optical film transmits one of the first polarized light and the second polarized light, which is emitted through the half-wave plate, and reflects the other light, the second optical film reflects the one light, and the composite light is reflected in a direction intersecting the longitudinal direction.
G02B 6/27 - Optical coupling means with polarisation selective and adjusting means
G02B 6/132 - Integrated optical circuits characterised by the manufacturing method by deposition of thin films
G02F 1/065 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on electro-optical organic material in an optical waveguide structure
G02F 1/225 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
G02B 6/12 - Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
An optical modulator that can effectively dissipate heat generated from the inside includes: an optical modulation element which includes an optical waveguide and a radio frequency electrode for controlling light waves propagating through the optical waveguide; a termination resistor electrically connected to the radio frequency electrode; a termination resistor board on which the termination resistor is disposed; and a package case, which houses the optical modulation element and the termination resistor board, in which a plurality of protrusion portions are formed on one external surface of the package case, and at least one of the protrusion portions is formed at a position on the external surface of the package case, which faces a position inside the package case where the termination resistor board is disposed with the package case in between.
G02F 1/225 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
G02F 1/21 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
An optical modulator according to the present invention comprises: a substrate which has electro-optic effects; an optical waveguide which is provided in the substrate; an optical fiber which is bonded to an end of the optical waveguide; a fixation member which is provided on an end part of the optical fiber; and an optical adhesive layer which bonds the optical fiber and the substrate to each other. The end of the optical waveguide is arranged in an end face of the substrate; the optical adhesive layer optically couples an end face of the optical fiber and an end of the optical waveguide with each other, while bonding the optical fiber, the fixation member and the substrate with each other; and the surface roughness of a surface of the fixation member, wherein the surface faces the end face of the substrate, is different from the surface roughness of an end face of the substrate, wherein the end face faces the surface of the fixation member.
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
85.
Electrostatic chuck device and production method for electrostatic chuck device
H01L 21/683 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping
H01L 21/687 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
86.
Electrostatic chuck device and method for manufacturing same
This electrostatic chuck device (1) includes a base (11) having one main surface serving as a mounting surface (19) on which a plate-shaped sample is mounted, and an electrode for electrostatic attraction (13) provided on the side opposite to the mounting surface (19) in the base (11), in which the base (11) consists of a ceramic material as a forming material, and the ceramic material contains aluminum oxide and silicon carbide as main components thereof, and has a layered graphene present at a grain boundary of the aluminum oxide.
H01T 23/00 - Apparatus for generating ions to be introduced into non-enclosed gases, e.g. into the atmosphere
H01L 21/683 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping
A ceramic substrate made of a dielectric material including silicon carbide particles, which is used as a forming material, in which the number of the silicon carbide particles per unit area on the surface of the substrate is smaller than the number of the silicon carbide particles per unit area in a cross section of the substrate.
H01L 21/683 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping
According to an electrostatic chuck device of the present invention, a cross-sectional shape of a base body in a thickness direction is a convex curved surface or a concave curved surface that gradually curves from a center of one main surface toward an outer periphery of the one main surface, an annular projection portion is provided on a peripheral portion on the one main surface of the base body so as to go around the peripheral portion, a plurality of convex projection portions are provided in a region surrounded by the annular projection portion, the convex projection portion has the top surface in contact with the plate-shaped sample, a side surface, and an R surface continuously connecting the top surface and the side surface.
H02N 13/00 - Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
H01L 21/683 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping
89.
Optical modulator and optical transmission apparatus
In an optical modulator, high frequency characteristics are improved and the stability thereof is improved. An optical modulator includes: an optical element substrate that includes an optical waveguide and a plurality of electrodes that control light waves propagating through the optical waveguide; and a package case that houses the optical element substrate, in which a plurality of signal input terminals, respectively electrically connected to the plurality of electrodes, are provided on the bottom surface of the package case, and the plurality of signal input terminals respectively electrically connected to the plurality of electrodes provided on the optical element substrate are divided and disposed on the sides facing each other with the optical element substrate interposed therebetween.
G02F 1/225 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
G02F 1/21 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
This electrostatic chuck device includes an electrostatic chuck part which has a placement surface on one main surface thereof to place a plate-shaped sample and has an electrode for electrostatic attraction; a temperature controlling base part configured to cool the electrostatic chuck part; and a heater element disposed between the electrostatic chuck part and the temperature controlling base part, in which the electrostatic chuck part and the temperature controlling base part are parts in which a plurality of through holes communicating in a thickness direction are provided, the heater element has a first site formed in a band shape and a second site continuous with the first site, wherein the second site is formed to have in a band shape and a closed ring shape, one through hole of the through holes is disposed on an inner peripheral side of the second site in plan view.
H01L 21/683 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
H01L 21/687 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
91.
Optical modulator and optical transmission apparatus using same
An initial change and a secular change in an optical characteristic and a high frequency characteristic in a case where an optical modulator is mounted in a package of an optical transmission apparatus are suppressed while improving a space utilization rate in the package of the optical transmission apparatus. An optical modulator that is electrically connected to an electric circuit configured on a circuit board, includes a package that houses an optical modulation element, in which the package has, on a bottom surface facing the circuit board, a plurality of first protruding bodies protruding from the bottom surface.
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
G02F 1/05 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect with ferro-electric properties
G02F 1/055 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect the active material being a ceramic
An initial change and a secular change in an optical characteristic and a high frequency characteristic in a case where an optical modulator is mounted in a package of an optical transmission apparatus are suppressed while improving a space utilization rate in the package of the optical transmission apparatus. An optical modulator that is electrically connected to an electric circuit configured on a circuit board, includes: a package that houses an optical modulation element; and a signal input part or the like for inputting an electric signal for causing the optical modulation element to perform an modulation operation from the electric circuit, in which the package has, on a part of a bottom surface facing the circuit board, a first protrusion portion protruding from the bottom surface, and the signal input part is provided on an upper surface of the first protrusion portion.
G02F 1/03 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
G02F 1/225 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
H04B 10/556 - Digital modulation, e.g. differential phase shift keying [DPSK] or frequency shift keying [FSK]
H04B 10/25 - Arrangements specific to fibre transmission
G02F 1/21 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
An electrostatic chuck device includes: an electrostatic chuck part having, as a main surface, a mounting surface on which a plate-shaped sample is mounted, an electrostatic attraction electrode; a base part configured to cool the electrostatic chuck part; a heater disposed in a layered manner between the electrostatic chuck part and the base part; and an adhesion layer which bonds and integrates the electrostatic chuck part and the base part together, in which the electrostatic chuck part is provided with a first through-hole, the base part is provided with a second through-hole communicating with the first through-hole, the adhesion layer is provided with a third through-hole communicating with the first through-hole and the second through-hole, a tubular insulator is fixed in the second through-hole, and an end of the insulator located on the electrostatic chuck part side is separated from the electrostatic chuck part with a space interposed therebetween.
H01L 21/683 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
H01L 21/687 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
H02N 13/00 - Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
94.
Optical modulator and optical transmission device using same
To provide a highly-reliable low-cost small optical modulator in which temperature drift is suppressed and an optical transmission device using the same. An optical modulator including an optical waveguide substrate 1 on which an optical waveguide is formed, a signal electrode which is provided on the optical waveguide substrate and applies an electric field to the optical waveguide, a termination substrate 3 provided with a termination resistor that terminates the signal electrode, and a housing 6 in which the optical waveguide substrate and the termination substrate are mounted, in which, in order to suppress conduction of heat generated from the termination resistor to the optical waveguide substrate through the housing, a groove 8 is formed in the housing 6 between the termination substrate 3 and the optical waveguide substrate 1.
G02B 6/42 - Coupling light guides with opto-electronic elements
G02F 1/225 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
G02F 1/21 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
95.
Titanium oxide powder, and dispersion and cosmetic using said powder
2/g or less and contains polyhedral-shaped titanium oxide particles having eight or more faces, in which a mass reduction rate in a case of being heated at 800° C. for 1 hour in an air atmosphere is 0.03% by mass or more and 0.5% by mass or less.
An optical modulator includes an optical modulation element having a plurality of signal electrodes; a plurality of signal input terminals each of which inputs an electrical signal to be applied to each signal electrode; a relay substrate on which a plurality of signal conductor patterns electrically connecting the signal input terminals and the signal electrodes, and a plurality of ground conductor patterns are formed; and a housing that houses the optical modulation element and the relay substrate, in which the relay substrate has at least one groove extending from the signal input side on which the signal input terminal is connected to the signal conductor pattern, in at least one ground conductor pattern formed between adjacent signal conductor patterns, and the groove is formed such that a length extending from the signal input side is longer than a length of the signal input terminal extending on the signal conductor pattern.
G02F 1/225 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
G02B 6/12 - Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
G02B 26/02 - Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
G02B 6/293 - Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
97.
Electrostatic chuck device and method of manufacturing electrostatic chuck device
H01T 23/00 - Apparatus for generating ions to be introduced into non-enclosed gases, e.g. into the atmosphere
H01L 21/683 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping
B23Q 3/15 - Devices for holding work using magnetic or electric force acting directly on the work
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
H01L 21/687 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
H02N 13/00 - Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
98.
Optical modulator and optical transmission apparatus using the same
An optical modulator includes an optical modulation element having a plurality of signal electrodes; a housing that houses the optical modulation element; a plurality of signal input terminals each of which inputs an electrical signal to be applied to each of the signal electrodes; and a relay substrate on which a plurality of signal conductor patterns that electrically connect each of the signal input terminals to each of the signal electrodes, and a plurality of ground conductor patterns are formed, in which the relay substrate is housed in the housing, and at least one input side ground conductor pattern extending from at least one of the ground conductor patterns is formed on an input side surface having a side on which an electrical signal output from the signal input terminal is input to the signal conductor pattern as one side.
G02F 1/225 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
G02F 1/21 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
In the optical waveguide device including an unnecessary-light waveguide for guiding unnecessary light emitted from a main waveguide, an emission waveguide connected to the unnecessary-light waveguide to emit the unnecessary light propagating through the unnecessary-light waveguide to the outside of the substrate is formed; an effective refractive index of the emission waveguide is set to be higher than an effective refractive index of the unnecessary-light waveguide; in a connection portion between the unnecessary-light waveguide and the emission waveguide, a centerline of the emission waveguide is inclined in a direction away from the main waveguide with respect to a centerline of the unnecessary-light waveguide; furthermore, in the connection portion, a position of the centerline of the emission waveguide is disposed to be shifted to a position further away from the main waveguide with respect to a position of the centerline of the unnecessary-light waveguide.
An optical waveguide element includes an optical waveguide which is formed on one surface of a substrate, an incidence part for light to be incident on the optical waveguide or an emission part for emitting light from the optical waveguide which is disposed in an end portion of the substrate, and a dielectric film which is formed on the optical waveguide of at least one of the incidence part and the emission part, and the vicinity thereof. Regarding the dielectric film, dielectric films including a dielectric film formed of a first material having an index of refraction higher than an index of refraction of the substrate and a dielectric film formed of a second material having an index of refraction lower than the index of refraction of the substrate are alternately laminated.
G02B 6/122 - Basic optical elements, e.g. light-guiding paths
G02B 6/13 - Integrated optical circuits characterised by the manufacturing method
G02B 6/30 - Optical coupling means for use between fibre and thin-film device
G02B 6/293 - Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
G02B 6/12 - Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
patents
