|
2024
|
P/S
|
Downloadable and prerecorded computer software for use in process control and yield management fo... |
|
2023
|
Invention
|
System and method for vacuum ultraviolet lamp assisted ignition of oxygen-containing laser sustai... |
|
|
Invention
|
System and method for determining post bonding overlay.
A wafer shape metrology system includes ... |
|
|
P/S
|
Downloadable computer (simulation) software for identifying stochastic defects in semiconductor w... |
|
|
Invention
|
Back-illuminated sensor and a method of manufacturing a sensor using a silicon on insulator wafer... |
|
|
Invention
|
Non-reagent chloride analysis in acid copper plating baths. The disclosed subject matter relates ... |
|
|
Invention
|
Plasma hypermodel integrated with feature-scale profile model for accelerated etch process develo... |
|
|
Invention
|
Magnetically opposed, iron core linear motor based motion stages for semiconductor wafer position... |
|
|
Invention
|
Correcting target locations for temperature in semiconductor applications. Methods and systems fo... |
|
|
Invention
|
Inspection of adaptive patterned workpieces with dynamic design and deep learning-based rendering... |
|
|
Invention
|
Pulse-assisted laser-sustained plasma in flowing high-presssure liquids. A pulse-assisted LSP bro... |
|
|
Invention
|
Mosaic overlay targets. A mosaic overlay target may include two or more cell sets distributed acr... |
|
|
Invention
|
Image pre-processing for overlay metrology using decomposition techniques. A system may include a... |
|
|
Invention
|
Pulse-assisted laser-sustained plasma in flowing high-pressure liquids.
A pulse-assisted LSP bro... |
|
|
Invention
|
Image pre-processing for overlay metrology using decomposition techniques.
A system may include ... |
|
|
Invention
|
Frictionless design of high-pressure recirculation thermo-pump. A thermo-pump includes a sealed c... |
|
|
Invention
|
Calibration of parametric measurement models based on in-line wafer measurement data. Methods and... |
|
|
Invention
|
Systems and methods for generating a flat-top illumination beam based on interlacing, incoherentl... |
|
|
Invention
|
Distortion reduction in a multi-beam imaging system. A system may include a controller couplable ... |
|
|
Invention
|
Frictionless design of high-pressure recirculation thermo-pump.
A thermo-pump includes a sealed ... |
|
|
Invention
|
Water cooled, air bearing based rotating anode x-ray illumination source. Methods and systems for... |
|
|
Invention
|
High-resolution evaluation of optical metrology targets for process control. A metrology system m... |
|
|
Invention
|
Calibration of parametric measurement models based on in-line wafer measurement data.
Methods an... |
|
|
Invention
|
System and method for acquiring alignment measurements of structures of a bonded sample. Systems ... |
|
|
Invention
|
Confocal chromatic metrology for euv source condition monitoring. A light source includes a rotat... |
|
|
Invention
|
Auto-focus sensor implementation for multi-column microscopes. An array of localized auto-focus s... |
|
|
Invention
|
Noise diagnostics for an electron beam inspection system with swathing. Parameters from an inspec... |
|
|
Invention
|
Multi-pitch grid overlay target for scanning overlay metrology. An overlay metrology system with ... |
|
|
Invention
|
Gas flow configurations for semiconductor inspections.
Methods and systems for inspecting a spec... |
|
|
Invention
|
Multi-pitch grid overlay target for scanning overlay metrology.
An overlay metrology system with... |
|
|
Invention
|
Deep learning model-based alignment for semiconductor applications. Methods and systems for deep ... |
|
|
Invention
|
Lithography mask repair by simulation of photoresist thickness evolution. A system for mask desig... |
|
|
Invention
|
Methods and systems for model-less, scatterometry based measurements of semiconductor structures.... |
|
|
Invention
|
Mosaic overlay targets.
A mosaic overlay target may include two or more cell sets distributed ac... |
|
|
Invention
|
Deep learning model-based alignment for semiconductor applications.
Methods and systems for deep... |
|
2022
|
Invention
|
Improved targets for diffraction-based overlay error metrology.
A method for semiconductor metro... |
|
|
Invention
|
Correcting target locations for temperature in semiconductor applications.
Methods and systems f... |
|
|
Invention
|
Distortion reduction in a multi-beam imaging system.
A system may include a controller couplable... |
|
|
Invention
|
High-resolution evaluation of optical metrology targets for process control.
A metrology system ... |
|
|
Invention
|
System and method for acquiring alignment measurements of structures of a bonded sample.
Systems... |
|
|
Invention
|
Confocal chromatic metrology for euv source condition monitoring.
A light source includes a rota... |
|
|
Invention
|
Auto-focus sensor implementation for multi-column microscopes.
An array of localized auto-focus ... |
|
|
Invention
|
Dynamic correction for an acousto-optic deflector.
An optical scanner may include a sampler to r... |
|
|
Invention
|
Noise diagnostics for an electron beam inspection system with swathing.
Parameters from an inspe... |
|
|
Invention
|
Methods and systems for x-ray scatterometry measurements employing a machine learning based elect... |
|
|
P/S
|
Server hardware and computer hardware that utilizes various model-based and model-less machine le... |
|
|
P/S
|
Computer servers [computer hardware]; Computer hardware for network access servers; Computer hard... |
|
|
Invention
|
Method and system of image-forming multi-electron beams.
A multi-electron beam system that forms... |
|
2021
|
P/S
|
Apparatus and instruments for recording, transmitting, reproducing or processing sound, images or... |
|
|
P/S
|
Downloadable computer software platform for remote customer assistance, training, and communicati... |
|
|
P/S
|
Downloadable computer software platform for software startup, documentation, and customer engagem... |
|
|
P/S
|
Scientific, research, navigation, surveying, photographic, cinematographic, audiovisual, optical,... |
|
2020
|
P/S
|
Data analytics computer hardware and prerecorded and
downloadable computer software for correcti... |
|
|
P/S
|
Downloadable and prerecorded computer software for use in
process control and yield management f... |
|
|
P/S
|
Scientific, electrical and measuring apparatus and
instruments for determining and analyzing phy... |
|
|
P/S
|
Computer hardware and downloadable and prerecorded computer
software for use in process control ... |
|
|
P/S
|
Computer hardware and downloadable and prerecorded computer
software all for testing, inspecting... |
|
|
P/S
|
Data analytics computer hardware and prerecorded and downloadable computer software for correctin... |
|
|
P/S
|
Downloadable computer simulation software used for
monitoring, controlling, accelerating and imp... |
|
|
P/S
|
Computer hardware, namely, computer server blade units to be
used in integrated circuits manufac... |
|
|
P/S
|
Scientific, electrical and measuring apparatus and instruments for determining and analyzing phys... |
|
2019
|
P/S
|
Computer hardware and downloadable and prerecorded computer software for use in process control a... |
|
|
P/S
|
Computer hardware and downloadable and prerecorded computer software all for testing, inspecting,... |
|
|
P/S
|
Downloadable computer simulation software used for monitoring, controlling, accelerating and impr... |
|
|
P/S
|
Computer hardware, namely, computer server blade units to be used in integrated circuits manufact... |
|
|
P/S
|
Inspection system comprised of a laser, recorded computer
software, and computer hardware for te... |
|
|
P/S
|
Computer hardware; computer hardware and software for testing, inspecting, characterizing, and pr... |
|
|
P/S
|
Inspection system comprised of a laser, recorded computer software, and computer hardware for tes... |
|
2018
|
P/S
|
Computer hardware; computer hardware and software for
testing, inspecting, characterizing, and p... |
|
|
P/S
|
Computer hardware and software used for testing, inspecting, characterizing, and predicting physi... |
|
|
P/S
|
Instruments for testing, inspecting, and characterizing physical properties of semiconductors and... |
|
|
P/S
|
instruments for testing, inspecting, and characterizing physical properties of reticles; computer... |
|
|
P/S
|
Instruments for testing, inspecting, and characterizing physical properties of semiconductor wafe... |
|
|
P/S
|
Consulting services in the field of product inspection and testing for the semiconductor, integra... |
|
|
P/S
|
computer hardware and software used for testing, inspecting, characterizing, and predicting physi... |
|
|
P/S
|
instruments for testing, inspecting, and characterizing physical properties of semiconductor wafe... |
|
|
P/S
|
metrology system comprised of computer software and computer hardware for testing and characteriz... |
|
2017
|
P/S
|
Computer hardware; semiconductor and wafer defect inspection systems comprised of computer softwa... |
|
2016
|
P/S
|
photomask blank inspection tool in the nature of testing equipment comprised of computer hardware... |
|
2015
|
P/S
|
Computer hardware; semiconductor and wafer defect inspection systems; computer software for use i... |
|
|
P/S
|
Scientific instrumentation for mechanical property testing, namely, nanoindentation testing of th... |
|
|
P/S
|
Computer hardware for testing and inspecting physical and electrical properties of semiconductors... |
|
2014
|
P/S
|
Nanomechanical laboratory testing instruments, namely, nanoindentation testing instruments having... |
|
2013
|
P/S
|
Scientific instrumentation for measuring mechanical properties |
|
2009
|
P/S
|
Computer hardware; computer software for use in process control and yield management for the semi... |
