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2023
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G/S
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Software-controlled systems used in the semiconductor manufacturing industry, namely, recorded so... |
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G/S
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Charitable services, namely providing financial support to women college students in STEM areas t... |
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G/S
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Semiconductor wafer processing equipment. |
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G/S
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Semiconductor manufacturing machines used for digital
lithography-based patterning. Recorded sof... |
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G/S
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Recorded computer software used for running, tracking, and providing feedback for on-tool metrolo... |
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G/S
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Downloadable and/or recorded software for use in wafer-less patterning of semiconductors |
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G/S
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Downloadable and/or recorded software for use in processing semiconductor wafer patterns and recipes |
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G/S
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Downloadable and/or recorded software for use in managing wafer fabrication recipes |
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G/S
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Semiconductor wafer inspection system used to inspect wafers for darkfield defects, including par... |
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G/S
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Eco-efficient semiconductor wafer processing equipment Software-controlled, eco-efficient systems... |
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G/S
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Business consulting and project management services in the field of designing, building, and vali... |
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G/S
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Downloadable and/or recorded software for use in processing semiconductor metrology data and fabr... |
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G/S
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Recorded software for use in semiconductor metrology |
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G/S
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Recorded software for use in managing semiconductor wafer fabrication recipes |
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G/S
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Educational services, namely, conducting seminars, lectures, tutorials, and workshops in the fiel... |
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G/S
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Battery films; lithium ion battery films Treatment and processing of battery films |
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G/S
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Semiconductor manufacturing machines used for digital lithography-based patterning Recorded softw... |
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Invention
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Vertically adjustable plasma source.
The disclosure describes a plasma source assemblies compris... |
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Invention
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Processing chamber condition and process state monitoring using optical reflector attached to pro... |
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Invention
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Autonomous substrate processing system.
A cool cluster comprises one or more transfer chambers; ... |
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Invention
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Chamber configurations and processes for particle control.
Exemplary processing methods may incl... |
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Invention
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Formulations for advanced polishing pads.
Methods and formulations for manufacturing polishing a... |
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Invention
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Methods for depositing blocking layers on conductive surfaces.
Methods of selectively depositing... |
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G/S
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Semiconductor wafer processing equipment |
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Invention
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Electrostatic chuck design with improved chucking and arcing performance.
Aspects of the present... |
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G/S
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Optical devices, namely, metasurface optical devices. Manufacturing services of metasurface optic... |
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Invention
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Apparatus and method for delivering a plurality of waveform signals during plasma processing.
Em... |
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Invention
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Snspd with integrated aluminum nitride seed or waveguide layer.
A superconducting nanowire singl... |
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G/S
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Treatment of materials, namely, mechanical, chemical and physical treatment of semiconductor mate... |
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G/S
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Hardware and recorded software for improving SEM overlay
designs in semiconductor wafer manufact... |
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G/S
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Software algorithm that utilizes CAD segmentation to enhance
defect detection. |
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Invention
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Method of forming interconnect structure.
Methods of depositing a metal film by exposing a subst... |
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G/S
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Recorded computer programs for use in cancer diagnosis;
recorded computer applications using art... |
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G/S
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Semiconductor wafer processing equipment, namely,
semiconductor manufacturing machines incorpora... |
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Invention
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Process chamber and process kits for advanced packaging. Process kits for processing chambers and... |
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Invention
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Enhanced chamber clean and recovery with dual flow path. Processing chambers comprising a chamber... |
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G/S
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Lithium ion batteries; lithium ion battery separator films Treatment and processing of lithium io... |
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G/S
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Semiconductor manufacturing equipment for depositing dielectric films and coatings |
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Invention
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Single side via fill process for through-vias. Methods and apparatus for single side filling of t... |
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Invention
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Dual channel showerhead assembly. Dual channel showerhead assemblies are described. In some embod... |
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Invention
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Support layer for small pitch fill. Provided is a DRAM device having a support layer is to hold t... |
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Invention
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Electrical improvements for 3d nand. Exemplary semiconductor processing methods may include provi... |
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Invention
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Low temperature n-type contact epi formation. Methods for forming a semiconductor structure and s... |
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Invention
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Support layer for small pitch fill.
Provided is a DRAM device having a support layer to hold the... |
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Invention
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Low temperature n-type contact epi formation.
Methods for forming a semiconductor structure and ... |
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Invention
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Process characterization and correction using optical wall process sensor (owps). A method includ... |
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Invention
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Low cost fabrication of optical device using discrete grating module assembly.
Embodiments of th... |
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Invention
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Low cost fabrication of optical device using discrete grating module assembly. Embodiments of the... |
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Invention
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Methods and apparatus for altering lithographic patterns to adjust plating uniformity. Methods an... |
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Invention
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Methods for forming charge layers using gas and liquid phase coatings. Methods for adjusting a wo... |
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Invention
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Radio frequency source for inductively coupled and capacitively coupled plasmas in substrate proc... |
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Invention
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Liner to form composite high-k dielectric.
Provided are methods to reduce the thickness of a hig... |
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G/S
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Semiconductor wafer metrology equipment |
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G/S
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Computer simulation software for use in semiconductor wafer
processing equipment operator training. |
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G/S
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Recorded software for use in semiconductor manufacturing,
namely, SQL server configurations for ... |
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Invention
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Electrostatic chuck with laser-machined mesas. Electrostatic chucks (ESCs) for reactor or plasma ... |
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Invention
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Variable rotation rate batch implanter. A system comprising a spinning disk is disclosed. The sys... |
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Invention
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Uniform radiation heating control archtecture. Embodiments disclosed herein include a method of m... |
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2022
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Invention
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Enhanced chamber clean and recovery with dual flow path.
Processing chambers comprising a chambe... |
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Invention
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Process chamber and process kits for advanced packaging.
Process kits for processing chambers an... |
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Invention
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Electrical improvements for 3d nand.
Exemplary semiconductor processing methods may include prov... |
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Invention
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Methods and mechanisms for measuring patterned substrate properties during substrate manufacturin... |
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Invention
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Pixelated showerhead for rf sensitive processes.
Exemplary semiconductor processing chambers may... |
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Invention
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Laser drilled faceplate.
Exemplary methods of fabricating a faceplate for a processing chamber m... |
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Invention
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Method of generating a computational model for improving parameter settings of one or more displa... |
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Invention
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Dual channel showerhead assembly.
Dual channel showerhead assemblies are described. In some embo... |
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Invention
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Integrated showerhead.
A showerhead for a processing chamber includes a faceplate with a plurali... |
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Invention
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Process characterization and correction using optical wall process sensor (owps).
A method inclu... |
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Invention
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Communication node to interface between evaluation systems and a manufacturing system.
An electr... |
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Invention
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Substrate processing for gan growth.
Exemplary semiconductor structures may include a silicon-co... |
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Invention
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Dense vertically segmented silicon coating for low defectivity in high-temperature rapid thermal ... |
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Invention
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Uniform radiation heating control architecture.
Embodiments disclosed herein include a method of... |
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Invention
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Machine learning model generation and updating for manufacturing equipment.
A method includes de... |
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2021
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Invention
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Tool drift compensation with machine learning.
Methods and systems for predictively determining ... |
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Invention
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Inorganic silicon-containing overhang structures of oled subpixels.
The present disclosure relat... |
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Invention
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Multiplexed hologram interference exposure system.
The present disclosure provides an apparatus ... |
